Mo master recipe

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Molybdenum (Mo)

Step Number	T000	T001	T002	T003	T004	T005	T006
Step Time (sec)	-	-	-	-	-	-	-
Min Vacuum Setpoint (Torr)	-	-	-	-	-	-	-
Gas - (PID or Fixed)	-	-	-	-	-	-	-
Gas - PID Master Gas Select	-	-	-	-	-	-	-
Gas1 - Setpoint (sccm)	-	-	-	-	-	-	-
Gas2 - Setpoint (sccm)	-	-	-	-	-	-	-
Gas PID Pressure (mTorr)	-	-	-	-	-	-	-
RF Source - Sputter (Watts)	-	-	-	-	-	-	-
RF Source - Cathode Select	-	-	-	-	-	-	-
RF Source - Shutter	-	-	-	-	-	-	-
DC 1 Source - Sputter (Watts)	-	-	-	-	-	-	-
DC 1 Source - Cathode Select	-	-	-	-	-	-	-
DC 1 Source - Shutter	-	-	-	-	-	-	-
DC 2 Source - Sputter (Watts)	-	-	-	-	-	-	-
DC 2 Source - Shutter	-	-	-	-	-	-	-
Pressure Control (Throttle)	-	-	-	-	-	-	-
Ignition Pressure (mTorr)	-	-	-	-	-	-	-
Rotation Speed (0-100%)	-	-	-	-	-	-	-
End Process (Yes)	-	-	-	-	-	-	-