Denton Explorer14 Magnetron Sputterer
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| Tool Name | Denton Explorer14 Magnetron Sputterer |
|---|---|
| Instrument Type | Deposition |
| Staff Manager | Jason (jarohr@seas.upenn.edu) |
| Lab Location | Bay 2 |
| Tool Manufacturer | Denton |
| Tool Model | Explorer14 |
| NEMO Designation | {{{NEMO_Designation}}} |
| Lab Phone | 215-898-9748 |
| SOP Link | SOP |
Description
Tool overview
The Denton Explorer-14 is a magnetron sputter deposition tool for depositing metallic and dielectric films. Sputter deposition is achieved by bombarding a source material with energetic ions, typically Ar+. Atoms at the surface of the target are knocked loose, and transported to the surface of the substrate, where deposition occurs. The tool is an open load system in sputter-down configuration with one dedicated DC gun and two guns that can use either a DC or RF power supply. Codeposition from two DC sources or one DC and one RF source is possible. The tool is equipped with a cryo-pump, with an automated interface, accepting substrate sizes from pieces through wafers with 150 mm diameters. The tool has platen rotation and cooling.
Maximum power
Maximum DC Power is 600 W.
Maximum RF Power is 200 W.
Available materials & process data
All process data were recorded at a base pressure lower than 5 x 10-6 Torr; you can never exceed 200 W on RF and 600 W on DC.
| Material Name | Max power | Process data | Recorded | ||
|---|---|---|---|---|---|
| Pressure | Power | Rate | |||
| Ag (silver) | 450 W | 3 mTorr | 140 W | 7.3 Å s-1 | |
| Al (aluminum) | 450 W | 3 mTorr | 200 W | 3.0 Å s-1 | |
| Au (gold) | 140 W | 3 mTorr | 140 W | 4.6 Å s-1 | |
| Cr (chromium) | 450 W | - | - | - | |
| Cu (copper) | 450 W | 3 mTorr | 400 W | 3.4 Å s-1 | |
| Fe (iron) | 350 W | - | - | - | |
| Ge (germanium) | 140 W | - | - | - | |
| ITO (Indium tin oxide) | 140 W | - | - | - | |
| Mn (manganese) | 140 W | - | - | - | |
| Mo (molybdenum) | 450 W | 3 mTorr | 140 | 1.9 Å s-1 | |
| Ni (nickel) | 350 W | - | - | - | |
| Pd (palladium) | 140 W | - | - | - | |
| Pt (platinum) | 140 W | 3 mTorr | 140 W | 2.6 Å s-1 | |
| i-Si (intrinsic silicon) | 140 W | - | - | - | |
| n-Si (n-type silicon) | 280 W | - | - | - | |
| p-Si (p-type silicon) | 280 W | - | - | - | |
| Ti (titanium) | 350 W | 3 mTorr | 350 W | 2.0 Å s-1 | |
| TiO2 (titanium dioxide) | 140 W | - | - | - | |
| W (tungsten) | 450 W | - | - | - | |
| YSZ (yttria-stabilized zirconia) | 140 W | - | - | - | |
Resources
SOPs & Troubleshooting
Master recipes
Coming soon
| Step Number | T000 | T001 | T002 | T003 | T004 | T005 | T006 |
|---|---|---|---|---|---|---|---|
| Step Time (sec) | - | - | - | - | - | - | - |
| Min Vacuum Setpoint (Torr) | - | - | - | - | - | - | - |
| Gas - (PID or Fixed) | - | - | - | - | - | - | - |
| Gas - PID Master Gas Select | - | - | - | - | - | - | - |
| Gas1 - Setpoint (sccm) | - | - | - | - | - | - | - |
| Gas2 - Setpoint (sccm) | - | - | - | - | - | - | - |
| Gas PID Pressure (mTorr) | - | - | - | - | - | - | - |
| RF Source - Sputter (Watts) | - | - | - | - | - | - | - |
| RF Source - Cathode Select | - | - | - | - | - | - | - |
| RF Source - Shutter | - | - | - | - | - | - | - |
| DC 1 Source - Sputter (Watts) | - | - | - | - | - | - | - |
| DC 1 Source - Cathode Select | - | - | - | - | - | - | - |
| DC 1 Source - Shutter | - | - | - | - | - | - | - |
| DC 2 Source - Sputter (Watts) | - | - | - | - | - | - | - |
| DC 2 Source - Shutter | - | - | - | - | - | - | - |
| Pressure Control (Throttle) | - | - | - | - | - | - | - |
| Ignition Pressure (mTorr) | - | - | - | - | - | - | - |
| Rotation Speed (0-100%) | - | - | - | - | - | - | - |
| End Process (Yes) | - | - | - | - | - | - | - |