CEE 200X Spinner

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**Spinner - SU8/PDMS**

Tool Name	Spinner - SU8/PDMS
Instrument Type	Lithography
Staff Manager	Ana Cohen
Lab Location	Soft Lithography
Tool Manufacturer	CEE
Tool Model	200X
NEMO Designation	SPN-07
Lab Phone	3-9639
SOP Link	SOP

Description

Spinner for coating substrates with thicker resists as well as PDMS. Control of ramp rate and speed. Includes wafer centering step.

Resources

SOPs & Troubleshooting

SOP: SOP
Video for basic tool use (6.47min):Video

Retrieved from "https://wiki.nano.upenn.edu/wiki/index.php?title=CEE_200X_Spinner&oldid=1297"

Soft Lithography