ADT 7100 Dicing Saw

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ADT 7100 Dicing Saw
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Tool Name ADT 7100 Dicing Saw
Instrument Type Back End
Staff Manager Eric Johnston
Lab Location Singh 104
Tool Manufacturer Advanced Dicing Technologies (ADT)
Tool Model 7122
NEMO Designation {{{NEMO_Designation}}}
Lab Phone none
SOP Link SOP

Description

Workhorse dicing saw with precision dicing and alignment system. This is an automated tool with a 2″, DC-brushless, 1.2 kW, Front-mounted, Air-bearing Spindle (60 krpm Max.), with closed-loop turntable, and is optimized for multi-angle dicing of thin, tight tolerance products up to 200 mm x 200 mm.

Applications
  • Dicing of Si wafers
  • Dicing of glass wafers
  • Dicing of sapphire wafers


Resources

ADT Contacts:

  • Bob McCort (semi-retired): rmccort@adt-co.com
SOPs & Troubleshooting