Intlvac E-beam Evaporator

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**Intlvac E-Beam Evaporator**

Tool Name	Intlvac E-Beam Evaporator
Instrument Type	Physical vapor deposition
Staff Manager	David Barth
Lab Location	Bay 2
Tool Manufacturer	Intlvac
Tool Model
NEMO Designation	PVD-09
Lab Phone	215-898-9748
SOP Link	SOP

Description

The tool

Available materials

The tool contains the following materials:

Al- Aluminum
Ti - Titanium

Resources

SOPs & Troubleshooting

Link: SOP

Retrieved from "https://wiki.nano.upenn.edu/wiki/index.php?title=Intlvac_E-beam_Evaporator&oldid=1944"

Deposition