Difference between revisions of "ABM3000HR Mask Aligner"
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m (Changed protection level for "ABM3000HR Mask Aligner" ([Edit=Allow only autoconfirmed users] (indefinite) [Move=Allow only autoconfirmed users] (indefinite))) |
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| Tool_Manufacturer = ABM | | Tool_Manufacturer = ABM | ||
| Tool_Model = 3000HR | | Tool_Model = 3000HR | ||
| − | | Iris_Designation = MA- | + | | Iris_Designation = MA-03 |
| Lab_Phone = 3-9639 | | Lab_Phone = 3-9639 | ||
| SOP Link = [https://repository.upenn.edu/scn_sop/10/ SOP] | | SOP Link = [https://repository.upenn.edu/scn_sop/10/ SOP] | ||
Revision as of 12:25, 8 July 2022
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| Tool Name | ABM 3000HR Mask Aligner |
|---|---|
| Instrument Type | Lithography |
| Staff Manager | Eric Johnston |
| Lab Location | Soft Lithography |
| Tool Manufacturer | ABM |
| Tool Model | 3000HR |
| NEMO Designation | {{{NEMO_Designation}}} |
| Lab Phone | 3-9639 |
| SOP Link | SOP |
Description
The ABM Mask Aligner is a manual and versatile mask aligner with top-side alignment and substrate capabilities from 100mm down to small pieces. Requires a 5" mask or 5" glass plate with film mask.
Applications
- xxx
Resources
SOPs & Troubleshooting
- SOP: SOP
- Video for basic tool use (no audio, 5.52min):Basic Video
- Video (LayoutEditor - negative resist alignment marks): Video