Denton Explorer14 Magnetron Sputterer

Denton Explorer14 Magnetron Sputterer

Tool Name	Denton Explorer14 Magnetron Sputterer
Instrument Type	Deposition
Staff Manager	Sam Azadi
Lab Location	Bay 2
Tool Manufacturer	Denton
Tool Model	Explorer14
NEMO Designation	{{{NEMO_Designation}}}
Lab Phone	XXXXX
SOP Link	SOP

Description

The Denton Explorer-14 is a magnetron sputter deposition tool for depositing metallic and dielectric films. Sputter deposition is achieved by bombarding a source material with energetic ions, typically Ar+. Atoms at the surface of the target are knocked loose, and transported to the surface of the substrate, where deposition occurs.

The tool is an open load system in sputter-down configuration with one dedicated DC gun and two guns that can use either a DC or RF power supply. Codeposition from two DC sources or one DC and one RF source is possible. The tool is equipped with a cryo-pump, with an automated interface, accepting substrate sizes from pieces through wafers with 150 mm diameters. The tool has platen rotation and cooling.

Maximum DC Power is 600 W.

Maximum RF Power is 200 W.

Deposition Sources

• ITO
• Cr
• Ti
• Ni
• Cu
• Al
• SiO2
• Ge
• Pt
• Au
• Ag
• Pd
• Si
• Al2O3
• Mo
• Various others - please contact staff

Material name Target Max allowed power [W] Silver Ag 450 Aluminum Al 450 Gold Au 140 Chromium Cr 450 Copper Cu 450 Iron Fe 350 Germanium Ge 140 Indium Tin Oxide ITO 140 Manganese Mn 140 Molybdenum Mo 450 Nickle Ni 350 Palladium Pd 140 Platinum Pt 140 Silicon - doped Si (doped) 280 Silicon - undoped Si (undoped) 140 Titanium Ti 350 Titanium oxide TiO2 140 Tungsten W 450 Yttria Stabilized Zirconia YSZ 140

Resources

SOPs & Troubleshooting

• SOP
• Target Request Form