Difference between revisions of "Jupiter II RIE Plasma Etcher"

From Quattrone Nanofabrication Facility
Jump to navigation Jump to search
m (Protected "Jupiter II RIE Plasma Etcher" ([Edit=Allow only administrators] (indefinite) [Move=Allow only administrators] (indefinite)) [cascading])
m (Changed protection level for "Jupiter II RIE Plasma Etcher" ([Edit=Allow only autoconfirmed users] (indefinite) [Move=Allow only autoconfirmed users] (indefinite)))
(No difference)

Revision as of 13:31, 2 May 2022


Jupiter II RIE Plasma Etcher
DE-08.jpeg
Tool Name Jupiter II RIE Plasma Etcher
Instrument Type Etch
Staff Manager Sam Azadi
Lab Location Bay 2
Tool Manufacturer March
Tool Model Jupiter II
NEMO Designation {{{NEMO_Designation}}}
Lab Phone XXXXX
SOP Link SOP

Description

The March Jupiter II is a reactive ion etcher configured with O2 gas. The system is typically used as a plasma asher/cleaner.

Applications
  • Removal of photoresist
  • Removal of organic materials


Resources

SOPs & Troubleshooting