Difference between revisions of "Jupiter II RIE Plasma Etcher"
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Revision as of 12:31, 2 May 2022
Tool Name | Jupiter II RIE Plasma Etcher |
---|---|
Instrument Type | Etch |
Staff Manager | Sam Azadi |
Lab Location | Bay 2 |
Tool Manufacturer | March |
Tool Model | Jupiter II |
NEMO Designation | {{{NEMO_Designation}}} |
Lab Phone | XXXXX |
SOP Link | SOP |
Description
The March Jupiter II is a reactive ion etcher configured with O2 gas. The system is typically used as a plasma asher/cleaner.
Applications
- Removal of photoresist
- Removal of organic materials