Difference between revisions of "Lesker PVD75 E-beam Evaporator"
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Revision as of 12:29, 2 May 2022
Tool Name | Lesker PVD75 E-Beam/Thermal Evaporator |
---|---|
Instrument Type | Deposition |
Staff Manager | David Jones |
Lab Location | Bay 2 |
Tool Manufacturer | Kurt J. Lesker |
Tool Model | PVD75 |
NEMO Designation | {{{NEMO_Designation}}} |
Lab Phone | 8-9748 |
SOP Link | SOP |
Description
The Kurt J. Lesker PVD75 E-beam Evaporator is an electron-beam (e-beam) evaporation tool. The tool is a fully automated system for depositing Ti, Cr, Au, and/or Pd via e-beam evaporation.
Films
- Ti
- Cr
- Au
- Pd