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Revision as of 12:29, 2 May 2022


Lesker PVD75 E-Beam/Thermal Evaporator
PVD-04.jpeg
Tool Name Lesker PVD75 E-Beam/Thermal Evaporator
Instrument Type Deposition
Staff Manager David Jones
Lab Location Bay 2
Tool Manufacturer Kurt J. Lesker
Tool Model PVD75
NEMO Designation {{{NEMO_Designation}}}
Lab Phone 8-9748
SOP Link SOP

Description

The Kurt J. Lesker PVD75 E-beam Evaporator is an electron-beam (e-beam) evaporation tool. The tool is a fully automated system for depositing Ti, Cr, Au, and/or Pd via e-beam evaporation.


Films
  • Ti
  • Cr
  • Au
  • Pd

Resources

PVD-4 Training Video

SOPs & Troubleshooting