EBSD

Overview

Electron Backscatter Diffraction (EBSD) allows for orientation mapping and phase identification in crystalline specimens in a scanning electron microscope based on patterns in backscattered electron images from a single point.

Theory

At high tilt angles, specimens emit a higher yield of backscattered electrons which have diffracted off crystal planes within specimens. The diffracted electrons produce Kikuchi lines that can be used to identify zone axes and crystal planes. Recent EBSD advancements automate the process to scan across a sample surface and interpret the EBSD patterns at each point to map phases or orientations within a specimen.

Equipment

Scanning Electron Microscopes

• TFS Quanta 600 FEG ESEM (EDAX)

Focused Ion Beam Microscopes

• TESCAN S8000X FIB/SEM (EDAX: EBSD SOP)
  • Sample on stub
  • Stub in Tower of Power
  • EBSD Tower of Power sample type
  • Position 7
  • Stage rotation 75
  • Launch APEX EBSD
  • Select Upper Right Chamberscope
  • Insert camera
  • Close door
  • Pump
  • Focus on sample
  • WD to 11 mm
  • Open Tools > Analysis & Measurement in Essence
  • Spot mode
  • Fast preset in APEX
  • Click optimize
  • Optimize gain and exposure (0.8-0.9)
  • Smart background
  • Good patterns on camera
  • Collect image
  • Save patterns checked(details)
  • In Essence, Menu > SEM > Geometric Transformations > Advanced for tilt correction
  • Rotation 285 (+/-)
  • Tilt correction 70
  • When done, retract camera
  • Vent
  • Set Z stage height to 81