Difference between revisions of "Nanoscribe Photonic Professional GT"

From Quattrone Nanofabrication Facility
Jump to navigation Jump to search
Line 21: Line 21:
 
'' '''Upgraded to GT+ in Dec 2024!''' Includes new housing with easier objective loading with 10x objective capability and greater print height (previously 3mm) ''
 
'' '''Upgraded to GT+ in Dec 2024!''' Includes new housing with easier objective loading with 10x objective capability and greater print height (previously 3mm) ''
  
=====Key Features=====
+
====Key Features====
 
* Laser Power: 50-150mW
 
* Laser Power: 50-150mW
 
* Print Height: Up to 8mm
 
* Print Height: Up to 8mm
 +
 
* Lateral resolution ~ 200 nm
 
* Lateral resolution ~ 200 nm
 
* Vertical resolution ~ 300 nm
 
* Vertical resolution ~ 300 nm
 
* Piezo scanning range: 300 x 300 x 300 μm3
 
* Piezo scanning range: 300 x 300 x 300 μm3
 
* Stage scanning range: 100 x 100 mm2
 
* Stage scanning range: 100 x 100 mm2
 +
 +
====Objectives====
 +
* 10x
 +
* 20x
 +
* 25x
 +
* 63x
 +
 +
== Allowed Materials ==
 +
'''Substrates'''
 +
* 4" Si wafers (~500um thickness)
 +
* Silicon pieces, 25mmx25mmx700um or 25mmx25mmx550um
 +
* Nanoscribe ITO-coated Soda Lime, 25mmx25mmx700um -- available in the [https://nemo.nano.upenn.edu/stockroom/ QNF Stockroom]
 +
* Nanoscribe Fused Silica, 25mmx25mmx700um -- available in the [https://nemo.nano.upenn.edu/stockroom/ QNF Stockroom]
 +
'''Resists'''
 +
* [[Resists_at_QNF#QNF_Supplied_Standard_Photoresists | IP-Dip]]
 +
* [[Resists_at_QNF#QNF_Supplied_Standard_Photoresists | IP-S]]
 +
* [[Resists_at_QNF#QNF_Supplied_Standard_Photoresists | IP-Q]]
 +
* [[Resists_at_QNF#QNF_Supplied_Standard_Photoresists | IP-PDMS]]
 +
 +
'''Other materials must have tool owner approval before use!'''
  
 
== Training Protocol ==
 
== Training Protocol ==
Line 38: Line 59:
 
* [https://wiki.nano.upenn.edu/wiki/images/d/d4/LW-02_SOP.pdf QNF SOP]
 
* [https://wiki.nano.upenn.edu/wiki/images/d/d4/LW-02_SOP.pdf QNF SOP]
 
* [https://support.nanoscribe.com/hc/en-gb NanoGuide]
 
* [https://support.nanoscribe.com/hc/en-gb NanoGuide]
 
==== References ====
 
* [https://www.nanoscribe.com/en/products/photonic-professional-gt2/ Nanoscribe GT System]
 
* [https://www.nanoscribe.com/en/products/ip-photoresins/ Nanoscribe IP Photoresins]
 
  
 
===== Related Processing =====
 
===== Related Processing =====
 
* [[Soft Lithography]]
 
* [[Soft Lithography]]
 
* [[Photolithography]]
 
* [[Photolithography]]
 +
 +
===== References =====
 +
* [https://www.nanoscribe.com/en/products/photonic-professional-gt2/ Nanoscribe GT System]
 +
* [https://www.nanoscribe.com/en/products/ip-photoresins/ Nanoscribe IP Photoresins]

Revision as of 11:23, 3 November 2025


Nanoscribe Photonic Professional GT+
LW-02.jpeg
Tool Name Nanoscribe Photonic Professional GT+
Instrument Type Lithography
Staff Manager Ana Cohen
Lab Location Bay 6
Tool Manufacturer Nanoscribe
Tool Model Photonic Professional GT+
NEMO Designation LW-02
Nearest Phone XXXXX
SOP Link SOP

Description

The Nanoscribe Photonic Professional enables the fabrication of true 3D structures in the microscale via two-photon polymerization using a 780nm laser with ~100fs pulse, 80MHz repetition rate. This system allows for cutting-edge research and rapid prototyping in microfluidics, MEMS, microoptics, nanostructures and more.

Upgraded to GT+ in Dec 2024! Includes new housing with easier objective loading with 10x objective capability and greater print height (previously 3mm)

Key Features

  • Laser Power: 50-150mW
  • Print Height: Up to 8mm
  • Lateral resolution ~ 200 nm
  • Vertical resolution ~ 300 nm
  • Piezo scanning range: 300 x 300 x 300 μm3
  • Stage scanning range: 100 x 100 mm2

Objectives

  • 10x
  • 20x
  • 25x
  • 63x

Allowed Materials

Substrates

  • 4" Si wafers (~500um thickness)
  • Silicon pieces, 25mmx25mmx700um or 25mmx25mmx550um
  • Nanoscribe ITO-coated Soda Lime, 25mmx25mmx700um -- available in the QNF Stockroom
  • Nanoscribe Fused Silica, 25mmx25mmx700um -- available in the QNF Stockroom

Resists

Other materials must have tool owner approval before use!

Training Protocol

1. Remote session on EBL-02 for the Describe conversion software, using your structure (90min)
2. In-person session on LW-02 (120min)
3. Qualification session on LW-02, where you run the tool with minimal input (~60min) -- must be done after previous two sessions are completed, cannot be done the same day as the in-person training

Resources

SOPs & Troubleshooting
Related Processing
References