Difference between revisions of "DMO MicroWriter ML3 Pro"
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| NEMO_Designation = LW-03 | | NEMO_Designation = LW-03 | ||
| Lab_Phone = | | Lab_Phone = | ||
| − | | SOP Link = [] | + | | SOP Link = [https://nemo.nano.upenn.edu/media/tool_documents/lw-03-dmo-ml3-pro/LW-03_SOP_v1.pdf SOP] |
}} | }} | ||
Revision as of 16:32, 11 August 2025
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| Tool Name | DMO MicroWriter ML3 Pro |
|---|---|
| Instrument Type | Lithography |
| Staff Manager | Dan Sabrsula |
| Lab Location | Bay 5 |
| Tool Manufacturer | Durham Magneto Optics |
| Tool Model | MicroWriter ML3 Pro |
| NEMO Designation | LW-03 |
| Nearest Phone | |
| SOP Link | SOP |
Description
The ML3 Pro is a flexible direct-write lithography tool with two laser sources at 405 nm and 365 nm and a minimum feature size of 400 nm.
Resources
SOPs & Troubleshooting
Link: SOP