Difference between revisions of "DMO MicroWriter ML3 Pro"
Jump to navigation
Jump to search
| Line 25: | Line 25: | ||
Link: [https://repository.upenn.edu/scn_sop/23/ SOP] | Link: [https://repository.upenn.edu/scn_sop/23/ SOP] | ||
| − | <pdf height="800">File: | + | <pdf height="800">File:LW-03 SOP v1.pdf</pdf> |
===== Process characterization and tool data ===== | ===== Process characterization and tool data ===== | ||
Revision as of 16:29, 11 August 2025
 |
|
| Tool Name | DMO MicroWriter ML3 Pro |
|---|---|
| Instrument Type | Lithography |
| Staff Manager | Dan Sabrsula |
| Lab Location | Bay 5 |
| Tool Manufacturer | Durham Magneto Optics |
| Tool Model | MicroWriter ML3 Pro |
| NEMO Designation | LW-03 |
| Nearest Phone | |
| SOP Link | [] |
Description
The ML3 Pro is a flexible direct-write lithography tool with two laser sources at 405 nm and 365 nm and a minimum feature size of 400 nm.
Resources
SOPs & Troubleshooting
Link: SOP