Difference between revisions of "Soft Lithography"
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* [https://www.youtube.com/watch?v=Wzrsv_01ZNE Developing SU8 Resist] | * [https://www.youtube.com/watch?v=Wzrsv_01ZNE Developing SU8 Resist] | ||
* [https://www.youtube.com/watch?v=powcV3r4IhM Degassing PDMS] | * [https://www.youtube.com/watch?v=powcV3r4IhM Degassing PDMS] | ||
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| + | =====Related Process Information===== | ||
| + | * [[Resists at QNF]] | ||
| + | * [[How to Make a Mask]] | ||
=====Internal Resources ===== | =====Internal Resources ===== | ||
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*[https://piescientific.com/resource-pdms-bonding/ PDMS Bonding - PIE Scientific] | *[https://piescientific.com/resource-pdms-bonding/ PDMS Bonding - PIE Scientific] | ||
*Microfluidics and Nanofluidics Handbook: SU-8 Photolithography and Its Impact on Microfluidics by Rodrigo Martinez-Duarte and Marc J. Madou | *Microfluidics and Nanofluidics Handbook: SU-8 Photolithography and Its Impact on Microfluidics by Rodrigo Martinez-Duarte and Marc J. Madou | ||
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Revision as of 12:56, 30 July 2025
Process Flow
- Making a Master - Example Process Flow
- Making a Device - Example Process Flow
Process Videos
- Spin Coating Thick Resist
- Use of MA-03, ABM Mask Aligner
- Negative Resist First Mask Alignment Mark
- Developing SU8 Resist
- Degassing PDMS
Related Process Information
Internal Resources
- T-Topping Study Report
- HARE SQ Adhesion Study - coming soon
- QNF Soft Lithography Workshop Process Flow - SU8 3050
- Presentation for Workshop - Biological Researchers (PDF Format)
- Presentation for ESE 536 Course Module (PDF Format)
External Resources
- HARE SQ Dispensing and Handling Techniques - KemLab
- PDMS Bonding - PIE Scientific
- Microfluidics and Nanofluidics Handbook: SU-8 Photolithography and Its Impact on Microfluidics by Rodrigo Martinez-Duarte and Marc J. Madou