Difference between revisions of "Soft Lithography"
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'''THIS PAGE IS UNDER CONSTRUCTION''' | '''THIS PAGE IS UNDER CONSTRUCTION''' | ||
| − | * [https://wiki.nano.upenn.edu/wiki/images/c/cf/Microfluidics_Process_Flow.pdf | + | =====Process Flow===== |
| − | + | * [https://wiki.nano.upenn.edu/wiki/images/c/cf/Microfluidics_Process_Flow.pdf Making a Master] | |
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<pdf height="800" width="1100"> File:SOP Microfluidics.pdf</pdf> | <pdf height="800" width="1100"> File:SOP Microfluidics.pdf</pdf> | ||
| − | * [[ | + | =====Process Videos===== |
| − | * [[ | + | * [https://www.youtube.com/watch?v=ybFHtd2pPYs Spin Coating Thick Resist] |
| + | * [https://www.youtube.com/watch?v=cRzLljt0VLs Use of MA-03, ABM Mask Aligner] | ||
| + | * [https://www.youtube.com/watch?v=SCs87pYIn5w Negative Resist First Mask Alignment Mark] | ||
| + | * [https://www.youtube.com/watch?v=Wzrsv_01ZNE Developing SU8 Resist] | ||
| + | * [https://www.youtube.com/watch?v=powcV3r4IhM Degassing PDMS] | ||
| − | =====Internal | + | =====Internal Resources ===== |
*[https://repository.upenn.edu/entities/publication/ae5bbb10-7b45-4568-9f0f-f2f27e7d95c2 T-Topping Study Report] | *[https://repository.upenn.edu/entities/publication/ae5bbb10-7b45-4568-9f0f-f2f27e7d95c2 T-Topping Study Report] | ||
*HARE SQ Adhesion Study ''- coming soon'' | *HARE SQ Adhesion Study ''- coming soon'' | ||
| + | * [https://upenn.box.com/s/b6e694cf6r5qul32cmsjkbr9oydc6d7o QNF Soft Lithography Workshop Process Flow - SU8 3050] | ||
| + | * [https://upenn.box.com/s/xrlkb6agcqae7ietb16mk5d84zqbcbr0 Presentation for Workshop - Biological Researchers (PDF Format)] | ||
| + | * [https://upenn.box.com/s/10wkjldwrt3f6it5ted0jo74b72eu0m4 Presentation for ESE 536 Course Module (PDF Format)] | ||
=====External Resources===== | =====External Resources===== | ||
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*[https://piescientific.com/resource-pdms-bonding/ PDMS Bonding - PIE Scientific] | *[https://piescientific.com/resource-pdms-bonding/ PDMS Bonding - PIE Scientific] | ||
*Microfluidics and Nanofluidics Handbook: SU-8 Photolithography and Its Impact on Microfluidics by Rodrigo Martinez-Duarte and Marc J. Madou | *Microfluidics and Nanofluidics Handbook: SU-8 Photolithography and Its Impact on Microfluidics by Rodrigo Martinez-Duarte and Marc J. Madou | ||
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| + | =====Related Process Information===== | ||
| + | * [[How to Make a Mask]] | ||
| + | * [[Resists at QNF]] | ||
Revision as of 12:54, 30 July 2025
THIS PAGE IS UNDER CONSTRUCTION
Process Flow
Process Videos
- Spin Coating Thick Resist
- Use of MA-03, ABM Mask Aligner
- Negative Resist First Mask Alignment Mark
- Developing SU8 Resist
- Degassing PDMS
Internal Resources
- T-Topping Study Report
- HARE SQ Adhesion Study - coming soon
- QNF Soft Lithography Workshop Process Flow - SU8 3050
- Presentation for Workshop - Biological Researchers (PDF Format)
- Presentation for ESE 536 Course Module (PDF Format)
External Resources
- HARE SQ Dispensing and Handling Techniques - KemLab
- PDMS Bonding - PIE Scientific
- Microfluidics and Nanofluidics Handbook: SU-8 Photolithography and Its Impact on Microfluidics by Rodrigo Martinez-Duarte and Marc J. Madou