Difference between revisions of "ABM Mask Aligner"
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* [https://nemo.nano.upenn.edu/media/tool_documents/ma-03-abm-mask-aligner/MA-03_SOP_v01.pdf SOP] | * [https://nemo.nano.upenn.edu/media/tool_documents/ma-03-abm-mask-aligner/MA-03_SOP_v01.pdf SOP] | ||
* [https://www.youtube.com/watch?v=cRzLljt0VLs Video - Standard procedure for previous model] *good overview, note slight differences* | * [https://www.youtube.com/watch?v=cRzLljt0VLs Video - Standard procedure for previous model] *good overview, note slight differences* | ||
| − | * [https://www.youtube.com/watch?v=Q1DvZBQgKhI&list=PLiihbHV9HgpX_9m5Khz2wn-XaxM5-yErU&index=16 Video - Alignment Marks ] | + | * [https://www.youtube.com/watch?v=Q1DvZBQgKhI&list=PLiihbHV9HgpX_9m5Khz2wn-XaxM5-yErU&index=16 Video - Alignment Marks ] |
| + | |||
| + | ===== [https://wiki.nano.upenn.edu/wiki/index.php?title=ABM3000HR_Mask_Aligner Calibration Instructions for Staff] | ||
Revision as of 13:19, 15 May 2025
| Tool Name | ABM Mask Aligner |
|---|---|
| Instrument Type | Lithography |
| Staff Manager | Ana Cohen |
| Lab Location | Bay 6 |
| Tool Manufacturer | ABM |
| Tool Model | |
| NEMO Designation | MA-03 |
| Nearest Phone | xxxxx |
| SOP Link | SOP |
Description
The ABM Mask Aligner is a manual and versatile mask aligner with top-side alignment and substrate capabilities from 100mm down to small pieces. Requires a 5" mask or 5" glass plate with film mask.
Applications
Tool is used primarily for SU8 exposure. It can also be used for aligning PDMS components for PDMS-to-PDMS bonding.
Exposure time = dose (mJ/cm^2) / intensity (mW/cm^2) Dose can be determined from the resist data sheet. See table below for intensities.
To obtain vertical sidewalls with a Cr glass mask, use the long pass filter (PL-360-LP) which eliminates UV emission below 350nm. Do not use with film masks. Inherent defects in film masks will be accentuated, resulting in worse results.
| mW/cm^2 | % of output | |
|---|---|---|
| NO MASK | ~10 | 100% |
| GLASS MASK | ~9 | 87.5% |
| GLASS + FILM MASK | ~7 | 68.5% |
| GLASS + LP FILTER | ~5 | 47% |
| GLASS + FILM + LP FILTER | ~4 | 37% |
More information about Soft Lithography processing can be found under Process Resources
Resources
MA-01 to MA-03 Calculator
SOPs & Troubleshooting
- SOP
- Video - Standard procedure for previous model *good overview, note slight differences*
- Video - Alignment Marks