Difference between revisions of "Intlvac E-beam Evaporator"
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| Line 11: | Line 11: | ||
| Tool_Manufacturer = Intlvac | | Tool_Manufacturer = Intlvac | ||
| Tool_Model = | | Tool_Model = | ||
| − | | NEMO_Designation = PVD- | + | | NEMO_Designation = PVD-09 |
| Lab_Phone = 215-898-9748 | | Lab_Phone = 215-898-9748 | ||
| SOP Link = [https://www.seas.upenn.edu/~nanosop/PVD75_e-beam_SOP.htm SOP] | | SOP Link = [https://www.seas.upenn.edu/~nanosop/PVD75_e-beam_SOP.htm SOP] | ||
Revision as of 09:54, 30 August 2024
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| Tool Name | Intlvac E-Beam Evaporator |
|---|---|
| Instrument Type | Physical vapor deposition |
| Staff Manager | David Barth |
| Lab Location | Bay 2 |
| Tool Manufacturer | Intlvac |
| Tool Model | |
| NEMO Designation | PVD-09 |
| Nearest Phone | 215-898-9748 |
| SOP Link | SOP |
Description
The tool
Available materials
The tool contains the following materials:
- Al- Aluminum
- Ti - Titanium
Resources
SOPs & Troubleshooting
Link: SOP