Difference between revisions of "Intlvac E-beam Evaporator"

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Line 11: Line 11:
 
| Tool_Manufacturer = Intlvac
 
| Tool_Manufacturer = Intlvac
 
| Tool_Model =  
 
| Tool_Model =  
| NEMO_Designation = PVD-00
+
| NEMO_Designation = PVD-09
 
| Lab_Phone = 215-898-9748
 
| Lab_Phone = 215-898-9748
 
| SOP Link = [https://www.seas.upenn.edu/~nanosop/PVD75_e-beam_SOP.htm SOP]
 
| SOP Link = [https://www.seas.upenn.edu/~nanosop/PVD75_e-beam_SOP.htm SOP]

Revision as of 09:54, 30 August 2024


Intlvac E-Beam Evaporator
PVD-04.jpeg
Tool Name Intlvac E-Beam Evaporator
Instrument Type Physical vapor deposition
Staff Manager David Barth
Lab Location Bay 2
Tool Manufacturer Intlvac
Tool Model
NEMO Designation PVD-09
Lab Phone 215-898-9748
SOP Link SOP

Description

The tool
Available materials

The tool contains the following materials:

  • Al- Aluminum
  • Ti - Titanium


Resources

SOPs & Troubleshooting

Link: SOP