Difference between revisions of "Intlvac E-beam Evaporator"

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(Created page with "Category:Deposition {{EquipmentInfo | name = Lesker PVD75 E-Beam/Thermal Evaporator | Tool_Name = Lesker PVD75 E-Beam/Thermal Evaporator | image = Image:PVD-04.jpeg|300...")
 
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{{EquipmentInfo
 
{{EquipmentInfo
| name = Lesker PVD75 E-Beam/Thermal Evaporator
+
| name = Intlvac E-Beam Evaporator
| Tool_Name = Lesker PVD75 E-Beam/Thermal Evaporator
+
| Tool_Name = Intlvac E-Beam Evaporator
 
| image = [[Image:PVD-04.jpeg|300px]]
 
| image = [[Image:PVD-04.jpeg|300px]]
 
| imagecaption =  
 
| imagecaption =  
Line 9: Line 9:
 
| Staff_Manager = [[David Barth | David Barth]]
 
| Staff_Manager = [[David Barth | David Barth]]
 
| Lab_Location = Bay 2
 
| Lab_Location = Bay 2
| Tool_Manufacturer = Kurt J. Lesker
+
| Tool_Manufacturer = Intlvac
| Tool_Model = PVD75
+
| Tool_Model =  
| NEMO_Designation = PVD-04
+
| NEMO_Designation = PVD-00
 
| Lab_Phone = 215-898-9748
 
| Lab_Phone = 215-898-9748
 
| SOP Link = [https://www.seas.upenn.edu/~nanosop/PVD75_e-beam_SOP.htm SOP]
 
| SOP Link = [https://www.seas.upenn.edu/~nanosop/PVD75_e-beam_SOP.htm SOP]

Revision as of 09:54, 30 August 2024


Intlvac E-Beam Evaporator
PVD-04.jpeg
Tool Name Intlvac E-Beam Evaporator
Instrument Type Physical vapor deposition
Staff Manager David Barth
Lab Location Bay 2
Tool Manufacturer Intlvac
Tool Model
NEMO Designation PVD-00
Lab Phone 215-898-9748
SOP Link SOP

Description

The tool
Available materials

The tool contains the following materials:

  • Al- Aluminum
  • Ti - Titanium


Resources

SOPs & Troubleshooting

Link: SOP