Difference between revisions of "Intlvac E-beam Evaporator"
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(Created page with "Category:Deposition {{EquipmentInfo | name = Lesker PVD75 E-Beam/Thermal Evaporator | Tool_Name = Lesker PVD75 E-Beam/Thermal Evaporator | image = Image:PVD-04.jpeg|300...") |
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{{EquipmentInfo | {{EquipmentInfo | ||
| − | | name = | + | | name = Intlvac E-Beam Evaporator |
| − | | Tool_Name = | + | | Tool_Name = Intlvac E-Beam Evaporator |
| image = [[Image:PVD-04.jpeg|300px]] | | image = [[Image:PVD-04.jpeg|300px]] | ||
| imagecaption = | | imagecaption = | ||
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| Staff_Manager = [[David Barth | David Barth]] | | Staff_Manager = [[David Barth | David Barth]] | ||
| Lab_Location = Bay 2 | | Lab_Location = Bay 2 | ||
| − | | Tool_Manufacturer = | + | | Tool_Manufacturer = Intlvac |
| − | | Tool_Model = | + | | Tool_Model = |
| − | | NEMO_Designation = PVD- | + | | NEMO_Designation = PVD-00 |
| Lab_Phone = 215-898-9748 | | Lab_Phone = 215-898-9748 | ||
| SOP Link = [https://www.seas.upenn.edu/~nanosop/PVD75_e-beam_SOP.htm SOP] | | SOP Link = [https://www.seas.upenn.edu/~nanosop/PVD75_e-beam_SOP.htm SOP] | ||
Revision as of 09:54, 30 August 2024
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| Tool Name | Intlvac E-Beam Evaporator |
|---|---|
| Instrument Type | Physical vapor deposition |
| Staff Manager | David Barth |
| Lab Location | Bay 2 |
| Tool Manufacturer | Intlvac |
| Tool Model | |
| NEMO Designation | PVD-00 |
| Nearest Phone | 215-898-9748 |
| SOP Link | SOP |
Description
The tool
Available materials
The tool contains the following materials:
- Al- Aluminum
- Ti - Titanium
Resources
SOPs & Troubleshooting
Link: SOP