Difference between revisions of "Filmetrics Profilm3D"
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Revision as of 09:44, 12 April 2023
Description
The Profilm3D is an optical profilometer capable of white light interferometry (WLI), green light interferometry (GLI), and phase shift interferometry (PSI). It can measure surface topography, roughness, and step heights from 1 nm up to 10 mm. The tool currently has a 10x interferometry objective with a field of view ~2x2mm.
Applications
- Step height measurements
- Surface roughness measurements
- 3D mapping of surfaces