Difference between revisions of "IntlVac NanoQuest 1 IBE"

**IntlVac Nanoquest 1**
Tool Name	IntlVac IBE
Instrument Type	Etch
Staff Manager	Sam Azadi
Lab Location	Bay 2
Tool Manufacturer	IntlVac
Tool Model	Nanoquest 1
NEMO Designation	DE-01
Lab Phone	215-898-9748
SOP Link	SOP

Revision as of 13:31, 30 September 2024

Description

Nanoquest 1 is an ion miller connected to Ar gas and capable of etch small mm-scale samples up to full 4" wafers. The tool is equipped with a secondary ion mass spectroscopy (SIMS) unit and is capable of etch with manual endpoint detection. The stage has a tilt motor that allows for etch angles between 0 (directly facing the beam) and 90 degrees (parallel to the beam).

The tool in QNF is connected to Ar gas and can etch samples up to 4" wafer. Available beam voltages are: 300 V, 400 V, 450 V, and 500 V

Applications

Ion milling

Resources

manual loading/unloading operation video

Standard Process Information

- Etch rate of Al grown on QNF's PVD-06 at 400 V, 45 degree, 15 RPM rotation is 1 nm/s -

SOPs & Troubleshooting

@@ Line 20: / Line 20: @@
 The tool in QNF is connected to Ar gas and can etch samples up to 4" wafer.
+Available beam voltages are: 300 V, 400 V, 450 V, and 500 V
 ===== Applications =====
@@ Line 30: / Line 31: @@
 [https://www.youtube.com/watch?v=1GsWXfCUXUg manual loading/unloading operation video]
+== Standard Process Information ==
+- Etch rate of Al grown on QNF's PVD-06 at 400 V, 45 degree, 15 RPM rotation is 1 nm/s
+-
 ===== SOPs & Troubleshooting =====