Difference between revisions of "Intlvac E-beam Evaporator"

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| name = Intlvac E-Beam Evaporator
 
| name = Intlvac E-Beam Evaporator
 
| Tool_Name = Intlvac E-Beam Evaporator
 
| Tool_Name = Intlvac E-Beam Evaporator
| image = [[Image:PVD-04.jpeg|300px]]
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| image = [[Image:PVD-09.jpeg|300px]]
 
| imagecaption =  
 
| imagecaption =  
 
| Instrument_Type = Physical vapor deposition
 
| Instrument_Type = Physical vapor deposition

Revision as of 14:43, 30 August 2024


Intlvac E-Beam Evaporator
300px
Tool Name Intlvac E-Beam Evaporator
Instrument Type Physical vapor deposition
Staff Manager David Barth
Lab Location Bay 2
Tool Manufacturer Intlvac
Tool Model
NEMO Designation PVD-09
Lab Phone 215-898-9748
SOP Link SOP

Description

The tool

The IntlVac Electron Beam Evaporator has a base process chamber pressure in the e-8 Torr range with substrate heating and ozone purging capabilities. Deposition rates are monitored by an automated magazine of 6MHz crystals. The tool can be used to process a single 4 inch wafer at a time or a selection of small chips/pieces.

Available materials

The tool contains the following materials:

  • Al - Aluminum
  • Ti - Titanium

Resources

SOPs & Troubleshooting

Link: