Difference between revisions of "Filmetrics Profilm3D"

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| SOP Link =   
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| SOP Link =  [https://repository.upenn.edu/cgi/viewcontent.cgi?article=1028&context=scn_sop SOP]
 
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===== SOPs & Troubleshooting =====
 
===== SOPs & Troubleshooting =====
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*[https://repository.upenn.edu/cgi/viewcontent.cgi?article=1028&context=scn_sop SOP]

Revision as of 12:16, 20 April 2023


Filmetrics Profilm3D Optical Profilometer
MET-05.jpeg
Tool Name Filmetrics Profilm3D Optical Profilometer
Instrument Type Metrology
Staff Manager David Barth
Lab Location Cleanroom Corridor
Tool Manufacturer Filmetrics
Tool Model Profilm3D
NEMO Designation {{{NEMO_Designation}}}
Lab Phone XXXXX
SOP Link SOP


Description

The Profilm3D is an optical profilometer capable of white light interferometry (WLI), green light interferometry (GLI), and phase shift interferometry (PSI). It can measure surface topography, roughness, and step heights from 1 nm up to 10 mm. The tool currently has a 10x interferometry objective with a field of view ~2x2mm.

Applications
  • Step height measurements
  • Surface roughness measurements
  • 3D mapping of surfaces


Resources

SOPs & Troubleshooting