Difference between revisions of "Filmetrics F50 (White Light)"
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| imagecaption = | | imagecaption = | ||
| Instrument_Type = Metrology | | Instrument_Type = Metrology | ||
| − | | Staff_Manager = | + | | Staff_Manager = [[David Barth | David Barth]] |
| − | | Lab_Location = | + | | Lab_Location = Cleanroom Corridor |
| Tool_Manufacturer = Filmetrics | | Tool_Manufacturer = Filmetrics | ||
| Tool_Model = F50 | | Tool_Model = F50 | ||
| − | | | + | | NEMO_Designation = MET-11 |
| Lab_Phone = XXXXX | | Lab_Phone = XXXXX | ||
| SOP Link = [https://www.seas.upenn.edu/~nanosop/F50_SOP.htm SOP] | | SOP Link = [https://www.seas.upenn.edu/~nanosop/F50_SOP.htm SOP] | ||
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===== Applications ===== | ===== Applications ===== | ||
* Thin-film thickness optical measurements | * Thin-film thickness optical measurements | ||
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== Resources == | == Resources == | ||
Latest revision as of 10:45, 28 June 2024
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| Tool Name | Filmetrics F50 (White Light) |
|---|---|
| Instrument Type | Metrology |
| Staff Manager | David Barth |
| Lab Location | Cleanroom Corridor |
| Tool Manufacturer | Filmetrics |
| Tool Model | F50 |
| NEMO Designation | MET-11 |
| Lab Phone | XXXXX |
| SOP Link | SOP |
Description
The Filmetrics F50 family of products can map film thickness as quickly as two points per second. A motorized R-Theta stage accepts standard and custom chucks for samples up to 200mm in diameter.
Map patterns can be polar, rectangular, or linear, or you can create your own with no limit on the number of measurement points. Dozens of pre-defined map patterns are supplied.
Applications
- Thin-film thickness optical measurements