Difference between revisions of "IPG IX-255 Excimer Micromachining Laser"

From Quattrone Nanofabrication Facility
Jump to navigation Jump to search
(update to NEMO)
 
(One intermediate revision by one other user not shown)
Line 2: Line 2:
  
 
{{EquipmentInfo
 
{{EquipmentInfo
| name = IPG IX-255 Excimer Micromachining Laser
+
| name = IPG IX-255 Excimer Micromachining Laser - 193nm
 
| Tool_Name = IPG IX-255 Excimer Micromachining Laser
 
| Tool_Name = IPG IX-255 Excimer Micromachining Laser
 
| image = [[Image:LMM-01.jpeg |300px]]
 
| image = [[Image:LMM-01.jpeg |300px]]
Line 8: Line 8:
 
| Instrument_Type = Back End
 
| Instrument_Type = Back End
 
| Staff_Manager = [[Eric Johnston | Eric Johnston]]
 
| Staff_Manager = [[Eric Johnston | Eric Johnston]]
| Lab_Location = Soft Lithography
+
| Lab_Location = Singh 124
 
| Tool_Manufacturer = IPG
 
| Tool_Manufacturer = IPG
 
| Tool_Model = IX-255
 
| Tool_Model = IX-255

Latest revision as of 10:55, 14 November 2024


IPG IX-255 Excimer Micromachining Laser - 193nm
LMM-01.jpeg
Tool Name IPG IX-255 Excimer Micromachining Laser
Instrument Type Back End
Staff Manager Eric Johnston
Lab Location Singh 124
Tool Manufacturer IPG
Tool Model IX-255
NEMO Designation LMM-01
Lab Phone 3-9639
SOP Link SOP

Description

The IPG IX-255 Excimer Laser is a highly flexible UV laser micromachining system for multi-purpose, R&D and production applications. The system combines a Class 1 workstation integrated with a proprietary UV (193nm) laser and beam shape selector (infinitely variable rectangular and discrete circular) to machine transparent samples such as plastic, glass, and PDMS.

Specifications
  • SN 32826
  • Laser 193nm
  • Pulse Energy up to 10 mJ
  • X-Y Positional Accuracy: <3 μm
  • Z-theta Accuracy: <10 μm, ±0.02°
  • Fixed Optics
  • Vision System Resolution 0.12 μm/ pixel
  • DXF and DWG drawing files accepted
Applications
  • Laser machining of plastics, glass and PDMS.


Resources

SOPs & Troubleshooting