Difference between revisions of "RENA Compass Dual Stack Spin Rinse Dryer"
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| Tool_Manufacturer = RENA | | Tool_Manufacturer = RENA | ||
| Tool_Model = Compass | | Tool_Model = Compass | ||
| − | | | + | | NEMO_Designation = SRD-01 |
| Lab_Phone = XXXXX | | Lab_Phone = XXXXX | ||
| SOP Link = [https://repository.upenn.edu/cgi/viewcontent.cgi?article=1026&context=scn_sop SOP] | | SOP Link = [https://repository.upenn.edu/cgi/viewcontent.cgi?article=1026&context=scn_sop SOP] | ||
Latest revision as of 14:25, 3 January 2024
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| Tool Name | RENA Compass Dual Stack Spin Rinse Dryer |
|---|---|
| Instrument Type | Wet Processing |
| Staff Manager | Kyle Keenan |
| Lab Location | Bay 3 |
| Tool Manufacturer | RENA |
| Tool Model | Compass |
| NEMO Designation | SRD-01 |
| Lab Phone | XXXXX |
| SOP Link | SOP |
Description
RENA Compass Spin Rinse Dryers (SRD) provide automated cleaning, rinsing, and drying of cassettes of 4" or 6" wafers after wet processing.
Applications
- Automatic SRD