Difference between revisions of "Mo master recipe"
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(Mo master recipe) |
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[[Denton_Explorer14_Magnetron_Sputterer | Return to PVD-05 ]] | [[Denton_Explorer14_Magnetron_Sputterer | Return to PVD-05 ]] | ||
| + | |||
| + | ===== Molybdenum (Mo) ===== | ||
| + | |||
| + | {| class="wikitable" | ||
| + | ! Step Number || T000 || T001 || T002 || T003 || T004 || T005 || T006 | ||
| + | |- | ||
| + | |- | ||
| + | | Step Time (sec) || - || - || - || - || - || - || - | ||
| + | |-style="background-color:#FFFFFF" | ||
| + | | Min Vacuum Setpoint (Torr) || - || - || - || - || - || - || - | ||
| + | |- | ||
| + | | || || || || || || || | ||
| + | |-style="background-color:#DBFEFF" | ||
| + | | Gas - (PID or Fixed) || - || - || - || - || - || - || - | ||
| + | |-style="background-color:#FFFFFF" | ||
| + | | Gas - PID Master Gas Select || - || - || - || - || - || - || - | ||
| + | |- | ||
| + | | Gas1 - Setpoint (sccm) || - || - || - || - || - || - || - | ||
| + | |-style="background-color:#FFFFFF" | ||
| + | | Gas2 - Setpoint (sccm) || - || - || - || - || - || - || - | ||
| + | |- | ||
| + | | || || || || || || || | ||
| + | |-style="background-color:#DEB4DC" | ||
| + | |Gas PID Pressure (mTorr) || - || - || - || - || - || - || - | ||
| + | |-style="background-color:#DCF5E9" | ||
| + | | RF Source - Sputter (Watts) || - || - || - || - || - || - || - | ||
| + | |-style="background-color:#DCF5E9" | ||
| + | | RF Source - Cathode Select || - || - || - || - || - || - || - | ||
| + | |-style="background-color:#DCF5E9" | ||
| + | | RF Source - Shutter || - || - || - || - || - || - || - | ||
| + | |-style="background-color:#ECFA6F" | ||
| + | | DC 1 Source - Sputter (Watts) || - || - || - || - || - || - || - | ||
| + | |-style="background-color:#ECFA6F" | ||
| + | | DC 1 Source - Cathode Select || - || - || - || - || - || - || - | ||
| + | |-style="background-color:#ECFA6F" | ||
| + | | DC 1 Source - Shutter || - || - || - || - || - || - || - | ||
| + | |-style="background-color:#FAD86F" | ||
| + | | DC 2 Source - Sputter (Watts) || - || - || - || - || - || - || - | ||
| + | |-style="background-color:#FAD86F" | ||
| + | | || || || || || || || | ||
| + | |-style="background-color:#FAD86F" | ||
| + | | DC 2 Source - Shutter || - || - || - || - || - || - || - | ||
| + | |-style="background-color:#6FD2FA" | ||
| + | | Pressure Control (Throttle) || - || - || - || - || - || - || - | ||
| + | |-style="background-color:#FFFFFF" | ||
| + | | Ignition Pressure (mTorr) || - || - || - || - || - || - || - | ||
| + | |- | ||
| + | | || || || || || || || | ||
| + | |-style="background-color:#E8F213" | ||
| + | | Rotation Speed (0-100%) || - || - || - || - || - || - || - | ||
| + | |- | ||
| + | | End Process (Yes) || - || - || - || - || - || - || - | ||
| + | |} | ||
Revision as of 13:59, 30 January 2023
Molybdenum (Mo)
| Step Number | T000 | T001 | T002 | T003 | T004 | T005 | T006 |
|---|---|---|---|---|---|---|---|
| Step Time (sec) | - | - | - | - | - | - | - |
| Min Vacuum Setpoint (Torr) | - | - | - | - | - | - | - |
| Gas - (PID or Fixed) | - | - | - | - | - | - | - |
| Gas - PID Master Gas Select | - | - | - | - | - | - | - |
| Gas1 - Setpoint (sccm) | - | - | - | - | - | - | - |
| Gas2 - Setpoint (sccm) | - | - | - | - | - | - | - |
| Gas PID Pressure (mTorr) | - | - | - | - | - | - | - |
| RF Source - Sputter (Watts) | - | - | - | - | - | - | - |
| RF Source - Cathode Select | - | - | - | - | - | - | - |
| RF Source - Shutter | - | - | - | - | - | - | - |
| DC 1 Source - Sputter (Watts) | - | - | - | - | - | - | - |
| DC 1 Source - Cathode Select | - | - | - | - | - | - | - |
| DC 1 Source - Shutter | - | - | - | - | - | - | - |
| DC 2 Source - Sputter (Watts) | - | - | - | - | - | - | - |
| DC 2 Source - Shutter | - | - | - | - | - | - | - |
| Pressure Control (Throttle) | - | - | - | - | - | - | - |
| Ignition Pressure (mTorr) | - | - | - | - | - | - | - |
| Rotation Speed (0-100%) | - | - | - | - | - | - | - |
| End Process (Yes) | - | - | - | - | - | - | - |