Difference between revisions of "Nanoscribe Photonic Professional GT"

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Revision as of 16:59, 7 November 2025


Nanoscribe Photonic Professional GT+
LW-02.jpeg
Tool Name Nanoscribe Photonic Professional GT+
Instrument Type Lithography
Staff Manager Ana Cohen
Lab Location Bay 6
Tool Manufacturer Nanoscribe
Tool Model Photonic Professional GT+
NEMO Designation LW-02
Nearest Phone XXXXX
SOP Link SOP

Description

The Nanoscribe Photonic Professional enables the fabrication of true 3D structures in the microscale via two-photon polymerization using a 780nm laser with ~100fs pulse, 80MHz repetition rate. This system allows for cutting-edge research and rapid prototyping in microfluidics, MEMS, microoptics, nanostructures and more.

Upgraded to GT+ in Dec 2024! Includes new housing with easier objective loading with 10x objective capability and greater print height (previously 3mm)

Tool Features

  • Laser Power: 50-150mW
  • Print Height: Up to 8mm
  • Lateral resolution ~ 200 nm
  • Vertical resolution ~ 300 nm
  • Piezo scanning range: 300 x 300 x 300 μm3
  • Stage scanning range: 100 x 100 mm2

Available Print Sets

Objective Voxel size (width) Print field radius Print time (per mm3) Compatible Resins Compatible Substrates
63x ~0.2 μm 100 μm ~2.5 hr IP-Dip, IP-PDMS, IP-L Fused Silica Glass, ITO/Soda Lime Glass, Silicon
25x ~0.6 μm 200 μm ~1.25 hr IP-S, IP-PDMS, IP-L, IP-Visio ITO/Soda Lime Glass, Silicon
10x ~1.2 μm 500 μm ~10 min IP-Q, IP-PDMS Silicon

Voxel = the smallest printable 3D volume, the 3D analogue of a 2D pixel. Single voxels are not mechanically stable. Multiple neighboring voxels/lines are recommended for stable structures.

Print field = the circular region an objective could write without moving the stage. Structures that exceed the print field of the objective must be split into blocks in Describe.

Print time= how long to take to print a 10 μm cube (1 mm3). The print times for the 25x and 10x are calculated for shell recipes. Solid recipes would take longer to print the same volume.

Allowed Materials

Substrates

  • 4" Si wafers (~500um thickness)
  • Silicon pieces, 25mmx25mmx700um or 25mmx25mmx550um
  • Nanoscribe ITO-coated Soda Lime Glass, 25mmx25mmx700um -- available in the QNF Stockroom
  • Nanoscribe Fused Silica Glass, 25mmx25mmx700um -- available in the QNF Stockroom
  • Borosilicate Coverslips, 30mm x 170um -- for oil immersion configuration

Resists

  • IP-Dip
  • IP-S
  • IP-Q
  • IP-PDMS
  • IP-L
  • IP-Visio

More information about these resists can be found here

Other materials must have tool owner approval before use!

Training Protocol

1. Remote session on EBL-02 for the Describe conversion software, using your structure (90min)
2. In-person session on LW-02 (120min)
3. Qualification session on LW-02, where you run the tool with minimal input (~60min) -- must be done after previous two sessions are completed, cannot be done the same day as the in-person training

All should be requested through NEMO.

Resources

SOPs & Troubleshooting
Related Processing
References