Difference between revisions of "Intlvac E-beam Evaporator"
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The tool contains the following materials: | The tool contains the following materials: | ||
− | * Al- Aluminum | + | * Al - Aluminum |
* Ti - Titanium | * Ti - Titanium | ||
− | |||
== Resources == | == Resources == |
Revision as of 09:55, 30 August 2024
Tool Name | Intlvac E-Beam Evaporator |
---|---|
Instrument Type | Physical vapor deposition |
Staff Manager | David Barth |
Lab Location | Bay 2 |
Tool Manufacturer | Intlvac |
Tool Model | |
NEMO Designation | PVD-09 |
Lab Phone | 215-898-9748 |
SOP Link | SOP |
Description
The tool
The IntlVac Electron Beam Evaporator has a base process chamber pressure in the e-8 Torr range with substrate heating and ozone purging capabilities. Deposition rates are monitored by an automated magazine of 6MHz crystals. The tool can be used to process a single 4 inch wafer at a time or a selection of small chips/pieces.
Available materials
The tool contains the following materials:
- Al - Aluminum
- Ti - Titanium
Resources
SOPs & Troubleshooting
Link: SOP