Difference between revisions of "KLA Tencor P7 2D profilometer"

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| imagecaption =  
 
| imagecaption =  
 
| Instrument_Type = Metrology
 
| Instrument_Type = Metrology
| Staff_Manager = Sam Azadi
+
| Staff_Manager = [[David Barth | David Barth]]
| Lab_Location = Bay 2
+
| Lab_Location = Cleanroom Corridor
 
| Tool_Manufacturer = KLA  
 
| Tool_Manufacturer = KLA  
 
| Tool_Model = P7
 
| Tool_Model = P7
| Iris_Designation = MET-01
+
| NEMO_Designation = MET-01
 
| Lab_Phone = XXXXX
 
| Lab_Phone = XXXXX
 
| SOP Link = [https://repository.upenn.edu/scn_sop/12/ SOP]
 
| SOP Link = [https://repository.upenn.edu/scn_sop/12/ SOP]
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===== SOPs & Troubleshooting =====
 
===== SOPs & Troubleshooting =====
 
* [https://repository.upenn.edu/scn_sop/12/ QNF SOP]
 
* [https://repository.upenn.edu/scn_sop/12/ QNF SOP]
 +
* [https://upenn.box.com/s/ir2f5bq3ig84nj8kcj74zh7ci4yyddll P7 Stylus Force Adjustment]
 +
* [https://upenn.box.com/s/znnrjm5ufix3sg7ao4os7n20zwyoe5ik Scan Offset Manual Adjustment]

Latest revision as of 10:44, 28 June 2024


KLA Tencor P7 2D profilometer
MET-01.jpeg
Tool Name KLA Tencor P7 2D profilometer
Instrument Type Metrology
Staff Manager David Barth
Lab Location Cleanroom Corridor
Tool Manufacturer KLA
Tool Model P7
NEMO Designation MET-01
Lab Phone XXXXX
SOP Link SOP

Description

The KLA-Tencor P7 Profiler is a highly sensitive surface profiler that measures step height, roughness, and waviness on sample surfaces. The KLA-Tencor Profiler systems use stylus-based scanning to achieve high resolution.

Applications
  • Film step height measurements
  • Photo resist thickness
  • Etched trench depth
  • Materials characterization for surface roughness and waviness


Resources

SOPs & Troubleshooting