Difference between revisions of "RENA Compass Dual Stack Spin Rinse Dryer"

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(Created page with "Category:Wet Processing {{EquipmentInfo | name = RENA Compass Dual Stack Spin Rinse Dryer | Tool_Name = RENA Compass Dual Stack Spin Rinse Dryer | image = Image:MET-08....")
 
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| name = RENA Compass Dual Stack Spin Rinse Dryer
 
| name = RENA Compass Dual Stack Spin Rinse Dryer
 
| Tool_Name = RENA Compass Dual Stack Spin Rinse Dryer
 
| Tool_Name = RENA Compass Dual Stack Spin Rinse Dryer
| image = [[Image:MET-08.jpeg|300px]]
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| image = [[Image:RENA_Compass.jpg|300px]]
 
| imagecaption =  
 
| imagecaption =  
 
| Instrument_Type = Wet Processing
 
| Instrument_Type = Wet Processing
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| Tool_Manufacturer = RENA
 
| Tool_Manufacturer = RENA
 
| Tool_Model = Compass
 
| Tool_Model = Compass
| Iris_Designation = SRD-01
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| NEMO_Designation = SRD-01
 
| Lab_Phone = XXXXX
 
| Lab_Phone = XXXXX
 
| SOP Link = [https://repository.upenn.edu/cgi/viewcontent.cgi?article=1026&context=scn_sop SOP]
 
| SOP Link = [https://repository.upenn.edu/cgi/viewcontent.cgi?article=1026&context=scn_sop SOP]

Latest revision as of 13:25, 3 January 2024


RENA Compass Dual Stack Spin Rinse Dryer
RENA Compass.jpg
Tool Name RENA Compass Dual Stack Spin Rinse Dryer
Instrument Type Wet Processing
Staff Manager Kyle Keenan
Lab Location Bay 3
Tool Manufacturer RENA
Tool Model Compass
NEMO Designation SRD-01
Lab Phone XXXXX
SOP Link SOP

Description

RENA Compass Spin Rinse Dryers (SRD) provide automated cleaning, rinsing, and drying of cassettes of 4" or 6" wafers after wet processing.

Applications
  • Automatic SRD


Resources

SOPs & Troubleshooting