IntlVac NanoQuest 1 IBE
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| Tool Name | IntlVac IBE |
|---|---|
| Instrument Type | Etch |
| Staff Manager | Sam Azadi |
| Lab Location | Bay 2 |
| Tool Manufacturer | IntlVac |
| Tool Model | Nanoquest 1 |
| NEMO Designation | DE-01 |
| Lab Phone | 215-898-9748 |
| SOP Link | SOP |
Description
NanoQuest 1 is an ion miller connected to Ar gas and capable of etching small mm-scale samples up to full 4" wafers. The tool is equipped with a secondary ion mass spectroscopy (SIMS) unit and is capable of etching with manual endpoint detection. The stage has a tilt motor that allows for etch angles between 0 (directly facing the beam) and 90 degrees (parallel to the beam).
The tool in QNF is connected to Ar gas and can etch samples up to 4" wafers. Available beam voltages are: 300 V, 400 V, 450 V, and 500 V
Applications
- Ion milling
Standard Process Information
| Material | Voltage [V] | tilt [degree] | Etch Rate [nm/min] |
|---|---|---|---|
| Al2O3 | 400 | 45 | 21 |
| SiO2 | 300 | 0 | 15 |
| SiO2 | 500 | 0 | 40 |
Process information from user community
| Material | Voltage [V] | tilt [degree] | Etch Rate [nm/min] |
|---|---|---|---|
| Al | 400 | 45 | 60 |
| Al | 500 | 45 | 100 |
| AlN | 500 | 45 | 52 |
| AlSc(.36)N | 500 | 45 | 50 |
| HfO2 | 300 | 0 | 20 |
| LiNbO3 | 500 | 0 | 40 |
| Pt | 500 | 45 | 20 |
| SiO2 | 500 | 45 | 78 |
SOP & Troubleshooting
- Operation video
manual loading/unloading operation video
- SOP