Difference between revisions of "Ti (titanium)"

Revision as of 13:42, 9 May 2024

Titanium is a transition metal with atomic number 22 and symbol Ti. Titanium has a low density, high strength and is resistant to corrosion by water. It has relatively poor electrical and thermal conduction compared to most metals.

Equipment

Deposition Equipment

PVD-02: Lesker PVD75 E-Beam/Thermal Evaporator
PVD-04: Lesker PVD75 E-beam Evaporator
PVD-03: Lesker PVD75 DC/RF Sputterer
PVD-05: Denton Explorer14 Magnetron Sputterer

Etching

Application

Processes

Sputter Deposition Rates

PVD Tool	Cathode 2 (DC; high mag)			Recorded	Cathode 3 (DC)			Recorded	Cathode 4 (DC; high mag)			Recorded
PVD Tool	Pressure	Power	Rate	Recorded	Pressure	Power	Rate	Recorded	Pressure	Power	Rate	Recorded
PVD-03	6 mTorr	300 W	1.8 Å s^-1		5 mTorr	300 W	0.98 Å s^-1	03/06/23	6 mTorr	300 W	0.8 Å s^-1

PVD Tool	Cathode 2 (DC; high mag)			Recorded
PVD Tool	Pressure	Power	Rate	Recorded	Pressure	Power	Rate	Pressure	Power	Rate
PVD-05	3 mTorr	350 W	2.0 Å s^-1

@@ Line 20: / Line 20: @@
 {| class="wikitable"
-! rowspan=2 | Material Name
+! rowspan=2 | PVD Tool
 ! colspan=3 | Cathode 2 (DC; high mag)
 ! rowspan=2 | Recorded
@@ Line 30: / Line 30: @@
 ! Pressure || Power || Rate || Pressure || Power || Rate || Pressure || Power || Rate
 |-
-| Ti(titanium) || 6 mTorr || 300 W || 1.8 Å s<sup>-1</sup> ||   || 5 mTorr || 300 W || 0.98 Å s<sup>-1</sup> || 03/06/23  || 6 mTorr || 300 W || 0.8 Å s<sup>-1</sup> ||
+| PVD-03 || 6 mTorr || 300 W || 1.8 Å s<sup>-1</sup> ||   || 5 mTorr || 300 W || 0.98 Å s<sup>-1</sup> || 03/06/23  || 6 mTorr || 300 W || 0.8 Å s<sup>-1</sup> ||
+|-
+|}
+{| class="wikitable"
+! rowspan=2 | PVD Tool
+! colspan=3 | Cathode 2 (DC; high mag)
+! rowspan=2 | Recorded
+|-
+! Pressure || Power || Rate || Pressure || Power || Rate || Pressure || Power || Rate
+|-
+| PVD-05 || 3 mTorr || 350 W || 2.0 Å s<sup>-1</sup> ||
 |-
 |}