Difference between revisions of "Tousimis Critical Point Dryer"
Jump to navigation
Jump to search
(update tool owner, update to NEMO) |
|||
| Line 8: | Line 8: | ||
| Instrument_Type = Back End | | Instrument_Type = Back End | ||
| Staff_Manager = [[Kyle Keenan | Kyle Keenan]] | | Staff_Manager = [[Kyle Keenan | Kyle Keenan]] | ||
| − | | Lab_Location = Bay | + | | Lab_Location = Bay 3 |
| Tool_Manufacturer = Tousimis | | Tool_Manufacturer = Tousimis | ||
| Tool_Model = 931-C | | Tool_Model = 931-C | ||
Latest revision as of 11:46, 28 June 2024
 |
|
| Tool Name | Tousimis Critical Point Dryer |
|---|---|
| Instrument Type | Back End |
| Staff Manager | Kyle Keenan |
| Lab Location | Bay 3 |
| Tool Manufacturer | Tousimis |
| Tool Model | 931-C |
| NEMO Designation | CPD-01 |
| Lab Phone | XXXXX |
| SOP Link | SOP |
Description
The system enables drying of delicate samples through the use of liquid carbon dioxide as a transitional fluid which has zero surface tension at the critical point (1072 psi at 31 C). The tool can process pieces up to several 100 mm substrates.
Applications
- Carbon dioxide (CO2) drying after release of bulk or surface micromachined devices