Difference between revisions of "Filmetrics F50 (UV Filter)"
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(update tool owner, update to NEMO) |
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| Instrument_Type = Metrology | | Instrument_Type = Metrology | ||
| Staff_Manager = [[David Barth | David Barth]] | | Staff_Manager = [[David Barth | David Barth]] | ||
| − | | Lab_Location = | + | | Lab_Location = Cleanroom Corridor |
| Tool_Manufacturer = Filmetrics | | Tool_Manufacturer = Filmetrics | ||
| Tool_Model = F50 | | Tool_Model = F50 | ||
Latest revision as of 11:44, 28 June 2024
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| Tool Name | Filmetrics F50 (UV Filter) |
|---|---|
| Instrument Type | Metrology |
| Staff Manager | David Barth |
| Lab Location | Cleanroom Corridor |
| Tool Manufacturer | Filmetrics |
| Tool Model | F50 |
| NEMO Designation | MET-03 |
| Lab Phone | XXXXX |
| SOP Link | SOP |
Description
The Filmetrics F50 family of products can map film thickness as quickly as two points per second. A motorized R-Theta stage accepts standard and custom chucks for samples up to 200mm in diameter. This system has a UV filter installed and is used for measuring film thicknesses of UV sensitive photoresists. A second F50 system without UV filters is located in the QNF (MET-11).
Map patterns can be polar, rectangular, or linear, or you can create your own with no limit on the number of measurement points. Dozens of pre-defined map patterns are supplied.
Applications
- Thin-film thickness optical measurements