Difference between revisions of "KLA Tencor P7 2D&3D/stress profilometer"
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(update tool owner, update to NEMO) |
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| Instrument_Type = Metrology | | Instrument_Type = Metrology | ||
| Staff_Manager = [[David Barth | David Barth]] | | Staff_Manager = [[David Barth | David Barth]] | ||
| − | | Lab_Location = | + | | Lab_Location = Cleanroom Corridor |
| Tool_Manufacturer = KLA | | Tool_Manufacturer = KLA | ||
| Tool_Model = P7 | | Tool_Model = P7 | ||
Latest revision as of 11:44, 28 June 2024
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| Tool Name | KLA Tencor P7 2D&3D/stress profilometer |
|---|---|
| Instrument Type | Metrology |
| Staff Manager | David Barth |
| Lab Location | Cleanroom Corridor |
| Tool Manufacturer | KLA |
| Tool Model | P7 |
| NEMO Designation | MET-02 |
| Lab Phone | XXXXX |
| SOP Link | SOP |
Description
The KLA-Tencor P7 Profiler is a highly sensitive surface profiler that measures step height, roughness, and waviness on sample surfaces. The KLA-Tencor Profiler systems use stylus-based scanning to achieve high resolution.
Applications
- Film step height measurements
- Photo resist thickness
- Etched trench depth
- Materials characterization for surface roughness and waviness
- Wafer bow / stress measurements