View source for SUSS MicroTec MA6 Gen3 Mask Aligner

[[Category:Lithography]]

{{EquipmentInfo
| name = SUSS MicroTec MA6 Gen3 Mask Aligner
| Tool_Name = SUSS MicroTec MA6 Gen3 Mask Aligner
| image = [[Image:MA-01.jpeg|300px]]
| imagecaption = 
| Instrument_Type = Lithography
| Staff_Manager = [[Ana Cohen | Ana Cohen]]
| Lab_Location = Bay 5
| Tool_Manufacturer = SUSS MicroTec
| Tool_Model = MA6 Gen3
| NEMO_Designation = MA-01
| Lab_Phone = XXXXX
| SOP Link = [https://www.seas.upenn.edu/~nanosop/MA6_SOP.htm SOP]
}}

== Description ==
This system is a dual-use mask aligner and wafer-bond aligner. Mask alignment is used for contact and proximity exposure processes. Exposures can be performed with gaps programmable from 10 um to 300 um in 1 um increments. Automatic wedge error compensation (WEC) is used to ensure that the mask and wafer are parallel. The lamp is a 1000 W Hg-Arc lamp. Integrated light level sensing ensures proper exposure doses as the lamp degrades.

===== Applications =====
* First mask exposure of resist-coated samples for patterning
* Aligned mask exposure of resist-coated samples for patterning
* Flood exposure of resist-coated samples for image reversal (AZ5214)
* Flood exposure of samples for further cross-linking of resist/resin

== Processes ==
=====Exposure Parameters=====
The following should help narrow down potential exposure parameters based on resist type and thickness. Information based on the following resist datasheets --
[https://amolf.nl/wp-content/uploads/2016/09/datasheets_S1800.pdf S1800 Series], 
[https://kayakuam.com/wp-content/uploads/2019/09/SPR-220-DATA-SHEET-RH.pdf SPR 220 Series], 
[https://kayakuam.com/wp-content/uploads/2019/09/SU-82000DataSheet2000_5thru2015Ver4-2.pdf SU-8 2000-2015], 
[https://kayakuam.com/wp-content/uploads/2019/09/SU-82000DataSheet2025thru2075Ver4-1.pdf SU-8 2025-2075], 
[https://kayakuam.com/wp-content/uploads/2019/09/SU-82000DataSheet2100and2150Ver5.pdf SU-8 2100],
[https://kayakuam.com/wp-content/uploads/2020/07/KAM-SU-8-3000-Datasheet-7.10-final.pdf SU-8 3000].

{| class="wikitable" style="vertical-align:bottom;"
|-
! Resist
! Thickness (um)
! Dose (mJ/cm2)
! Channel
|-
| S1813
| 1.2
| 150
| #2
|-
| SPR220 - 3.0
| 3.0
| 310
| #1
|-
| SPR220 - 4.5
| 5.0
| 380
| #1
|-
| SU-8 2005
| 5.0 - 6.0
| 105 - 110
| #1
|-
| SU-8 2050
| 40 - 80
| 150 - 215
| #1
|-
|  
| 80 - 110
| 215 - 240
| #1
|-
|  
| 115 - 160
| 240 - 260
| #1
|-
| SU-8 2100
| 100 - 150
| 240 - 260
| #1
|-
|  
| 150 - 225
| 260 - 350
| #1
|-
|  
| 225 - 270
| 350 - 370
| #1
|-
| SU-8 3050
| 40 - 100
| 150 - 250
| #1
|}

===== Exposure Wavelengths =====

The software adjusts the lamp intensity controller during exposure based on the channel selected in the recipe.
* Channel #1 = 365nm (i-line)
* Channel #2 = 405nm (h-line)

For some applications it can be beneficial to eliminate wavelengths below 365nm using a long pass filter. ''' ''Contact staff to be trained on setting this filter if you plan to use it.'' ''' Since higher energy wavelengths are removed, expect an increase in exposure time of approximately 40% to reach the optimum exposure dose.

== Resources ==

===== SOPs & Troubleshooting =====
* [https://www.seas.upenn.edu/~nanosop/MA6_SOP.htm SOP]
* If the recipe cannot be changed directly with the recipe button it typically means that the user management software has been logged out. To fix it, do the following:
** Minimize the main software
** Open the 'User Management' software on the desktop
** Login with username:user and no password

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