Tousimis Critical Point Dryer
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| Tool Name | Tousimis Critical Point Dryer |
|---|---|
| Instrument Type | Back End |
| Staff Manager | David Jones |
| Lab Location | Bay 2 |
| Tool Manufacturer | Tousimis |
| Tool Model | 931-C |
| NEMO Designation | {{{NEMO_Designation}}} |
| Lab Phone | XXXXX |
| SOP Link | SOP |
Description
The system enables drying of delicate samples through the use of liquid carbon dioxide as a transitional fluid which has zero surface tension at the critical point (1072 psi at 31 C). The tool can process pieces up to several 100 mm substrates.
Applications
- Carbon dioxide (CO2) drying after release of bulk or surface micromachined devices