Difference between revisions of "Process Resources"
Jump to navigation
Jump to search
| Line 1: | Line 1: | ||
| + | = General Process Documents= | ||
| + | * [https://upenn.box.com/s/ol48q2o2pq7it1kn7spai87c9ene9cvs KemLab Resist Presentation] | ||
| + | |||
= Film Characterization= | = Film Characterization= | ||
* [https://upenn.app.box.com/file/1004242723681 Deposition and Etch Characterization of LPCVD SiNx thin films] | * [https://upenn.app.box.com/file/1004242723681 Deposition and Etch Characterization of LPCVD SiNx thin films] | ||
Revision as of 10:32, 2 March 2023
General Process Documents
Film Characterization
- Deposition and Etch Characterization of LPCVD SiNx thin films
- ALD deposition of SiO2 using BDEAS and Ozone precursors