Difference between revisions of "Process Resources"
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= Film Characterization= | = Film Characterization= | ||
* [https://upenn.app.box.com/file/1004242723681 Deposition and Etch Characterization of LPCVD SiNx thin films] | * [https://upenn.app.box.com/file/1004242723681 Deposition and Etch Characterization of LPCVD SiNx thin films] | ||
| + | * [https://upenn.app.box.com/file/1004880785762 ALD deposition of SiO2 using BDEAS and Ozone precursors] | ||
= Soft Lithography = | = Soft Lithography = | ||