Difference between revisions of "Lesker PVD75 E-beam Evaporator"
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| Tool_Model = PVD75 | | Tool_Model = PVD75 | ||
| Iris_Designation = PVD-04 | | Iris_Designation = PVD-04 | ||
| − | | Lab_Phone = | + | | Lab_Phone = 8-9748 |
| SOP Link = [https://www.seas.upenn.edu/~nanosop/PVD75_e-beam_SOP.htm SOP] | | SOP Link = [https://www.seas.upenn.edu/~nanosop/PVD75_e-beam_SOP.htm SOP] | ||
}} | }} | ||
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===== SOPs & Troubleshooting ===== | ===== SOPs & Troubleshooting ===== | ||
| − | * [https:// | + | * [https://repository.upenn.edu/scn_protocols/73/ QNF SOP] |
Revision as of 11:24, 1 April 2022
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| Tool Name | Lesker PVD75 E-Beam/Thermal Evaporator |
|---|---|
| Instrument Type | Deposition |
| Staff Manager | David Jones |
| Lab Location | Bay 2 |
| Tool Manufacturer | Kurt J. Lesker |
| Tool Model | PVD75 |
| NEMO Designation | {{{NEMO_Designation}}} |
| Lab Phone | 8-9748 |
| SOP Link | SOP |
Description
Blurb goes here.
Films
- Ti
- Cr
- Au
- Pd