KLA Tencor P7 2D profilometer

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KLA Tencor P7 2D profilometer
MET-01.jpeg
Tool Name KLA Tencor P7 2D profilometer
Instrument Type Metrology
Staff Manager David Barth
Lab Location Bay 2
Tool Manufacturer KLA
Tool Model P7
NEMO Designation MET-01
Lab Phone XXXXX
SOP Link SOP

Description

The KLA-Tencor P7 Profiler is a highly sensitive surface profiler that measures step height, roughness, and waviness on sample surfaces. The KLA-Tencor Profiler systems use stylus-based scanning to achieve high resolution.

Applications
  • Film step height measurements
  • Photo resist thickness
  • Etched trench depth
  • Materials characterization for surface roughness and waviness


Resources

SOPs & Troubleshooting
Retrieved from "https://wiki.nano.upenn.edu/wiki/index.php?title=KLA_Tencor_P7_2D_profilometer&oldid=1300"