Difference between revisions of "KLA Tencor P7 2D profilometer"
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(update tool owner, update to NEMO) |
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| imagecaption = | | imagecaption = | ||
| Instrument_Type = Metrology | | Instrument_Type = Metrology | ||
| − | | Staff_Manager = | + | | Staff_Manager = [[David Barth | David Barth]] |
| Lab_Location = Bay 2 | | Lab_Location = Bay 2 | ||
| Tool_Manufacturer = KLA | | Tool_Manufacturer = KLA | ||
| Tool_Model = P7 | | Tool_Model = P7 | ||
| − | | | + | | NEMO_Designation = MET-01 |
| Lab_Phone = XXXXX | | Lab_Phone = XXXXX | ||
| SOP Link = [https://repository.upenn.edu/scn_sop/12/ SOP] | | SOP Link = [https://repository.upenn.edu/scn_sop/12/ SOP] | ||
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===== SOPs & Troubleshooting ===== | ===== SOPs & Troubleshooting ===== | ||
* [https://repository.upenn.edu/scn_sop/12/ QNF SOP] | * [https://repository.upenn.edu/scn_sop/12/ QNF SOP] | ||
| + | * [https://upenn.box.com/s/ir2f5bq3ig84nj8kcj74zh7ci4yyddll P7 Stylus Force Adjustment] | ||
| + | * [https://upenn.box.com/s/znnrjm5ufix3sg7ao4os7n20zwyoe5ik Scan Offset Manual Adjustment] | ||
Latest revision as of 14:17, 3 January 2024
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| Tool Name | KLA Tencor P7 2D profilometer |
|---|---|
| Instrument Type | Metrology |
| Staff Manager | David Barth |
| Lab Location | Bay 2 |
| Tool Manufacturer | KLA |
| Tool Model | P7 |
| NEMO Designation | MET-01 |
| Lab Phone | XXXXX |
| SOP Link | SOP |
Description
The KLA-Tencor P7 Profiler is a highly sensitive surface profiler that measures step height, roughness, and waviness on sample surfaces. The KLA-Tencor Profiler systems use stylus-based scanning to achieve high resolution.
Applications
- Film step height measurements
- Photo resist thickness
- Etched trench depth
- Materials characterization for surface roughness and waviness