Denton Explorer14 Magnetron Sputterer

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Denton Explorer14 Magnetron Sputterer
PVD-05.jpeg
Tool Name Denton Explorer14 Magnetron Sputterer
Instrument Type Deposition
Staff Manager Jason Röhr
Lab Location Bay 2
Tool Manufacturer Denton
Tool Model Explorer14
NEMO Designation {{{NEMO_Designation}}}
Lab Phone 215-898-9748
SOP Link SOP

Description

The Denton Explorer-14 is a magnetron sputter deposition tool for depositing metallic and dielectric films. Sputter deposition is achieved by bombarding a source material with energetic ions, typically Ar+. Atoms at the surface of the target are knocked loose, and transported to the surface of the substrate, where deposition occurs.

The tool is an open load system in sputter-down configuration with one dedicated DC gun and two guns that can use either a DC or RF power supply. Codeposition from two DC sources or one DC and one RF source is possible. The tool is equipped with a cryo-pump, with an automated interface, accepting substrate sizes from pieces through wafers with 150 mm diameters. The tool has platen rotation and cooling.

Maximum DC Power is 600 W.

Maximum RF Power is 200 W.


Deposition Sources
  • ITO
  • Cr
  • Ti
  • Ni
  • Cu
  • Al
  • SiO2
  • Ge
  • Pt
  • Au
  • Ag
  • Pd
  • Si
  • Al2O3
  • Mo
  • Various others - please contact staff
Deposition Power
Material Name Target Name Maximum Allowed Power [W]
Silver Ag 450
Aluminum Al 450
Gold Au 140
Chromium Cr 450
Copper Cu 450
Iron Fe 350
Germanium Ge 140
Indium Tin Oxide ITO 140
Manganese Mn 140
Molybdenum Mo 450
Nickle Ni 350
Palladium Pd 140
Platinum Pt 140
Silicon (Doped) Si (Doped) 280
Silicon (Undoped) Si (Undoped) 140
Titanium Ti 350
Titanium Oxide TiO2 140
Tungsten W 450
Yttria Stabilized Zirconia YSZ 140

Resources

SOPs & Troubleshooting