Denton Explorer14 Magnetron Sputterer

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Denton Explorer14 Magnetron Sputterer
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Tool Name Denton Explorer14 Magnetron Sputterer
Instrument Type Deposition
Staff Manager Sam Azadi
Lab Location Bay 2
Tool Manufacturer Denton
Tool Model Explorer14
NEMO Designation {{{NEMO_Designation}}}
Lab Phone XXXXX
SOP Link SOP

Description

The Denton Explorer-14 is a magnetron sputter deposition tool for depositing metallic and dielectric films. Sputter deposition is achieved by bombarding a source material with energetic ions, typically Ar+. Atoms at the surface of the target are knocked loose, and transported to the surface of the substrate, where deposition occurs.

The tool is an open load system in sputter-down configuration with one dedicated DC gun and two guns that can use either a DC or RF power supply. Codeposition from two DC sources or one DC and one RF source is possible. The tool is equipped with a cryo-pump, with an automated interface, accepting substrate sizes from pieces through wafers with 150 mm diameters. The tool has platen rotation and cooling.

Maximum DC Power is 600 W.

Maximum RF Power is 200 W.


Deposition Sources
  • ITO
  • Cr
  • Ti
  • Ni
  • Cu
  • Al
  • SiO2
  • Ge
  • Pt
  • Au
  • Ag
  • Pd
  • Si
  • Al2O3
  • Mo
  • Various others - please contact staff


Maximum Allowed Deposition Power
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Material Name Target Maximum Allowed Power [W]

Resources

SOPs & Troubleshooting