Denton Explorer14 Magnetron Sputterer

Denton Explorer14 Magnetron Sputterer

Tool Name	Denton Explorer14 Magnetron Sputterer
Instrument Type	Deposition
Staff Manager	Jason (jarohr@seas.upenn.edu)
Lab Location	Bay 2
Tool Manufacturer	Denton
Tool Model	Explorer14
NEMO Designation	{{{NEMO_Designation}}}
Lab Phone	215-898-9748
SOP Link	SOP

Description

The Denton Explorer-14 is a magnetron sputter deposition tool for depositing metallic and dielectric films. Sputter deposition is achieved by bombarding a source material with energetic ions, typically Ar+. Atoms at the surface of the target are knocked loose, and transported to the surface of the substrate, where deposition occurs.

The tool is an open load system in sputter-down configuration with one dedicated DC gun and two guns that can use either a DC or RF power supply. Codeposition from two DC sources or one DC and one RF source is possible. The tool is equipped with a cryo-pump, with an automated interface, accepting substrate sizes from pieces through wafers with 150 mm diameters. The tool has platen rotation and cooling.

Maximum DC Power is 600 W.

Maximum RF Power is 200 W.

Deposition Sources

• ITO
• Cr
• Ti
• Ni
• Cu
• Al
• SiO2
• Ge
• Pt
• Au
• Ag
• Pd
• Si
• Al2O3
• Mo
• Various others - please contact staff

Available materials & process data

• All process data were recorded at a base pressure lower than 5 x 10-6 Torr

Material Name	Max power	Process data			Recorded
		Pressure	Power	Rate
Ag (silver)	450 W	3 mTorr	140 W	7.3 Å s-1
Al (aluminum)	450 W	3 mTorr	200 W	3.0 Å s-1
Au (gold)	140 W	3 mTorr	140 W	4.6 Å s-1
Cr (chromium)	450 W	-	-	-
Cu (copper)	450 W	3 mTorr	400 W	3.4 Å s-1
Fe (iron)	350 W	-	-	-
Ge (germanium)	140 W	-	-	-
ITO (Indium tin oxide)	140 W	-	-	-
Mn (manganese)	140 W	-	-	-
Mo (molybdenum)	450 W	3 mTorr	140	1.9 Å s-1
Ni (nickel)	350 W	-	-	-
Pd (palladium)	140 W	-	-	-
Pt (platinum)	140 W	3 mTorr	140 W	2.6 Å s-1
i-Si (intrinsic silicon)	140 W	-	-	-
n-Si (n-type silicon)	280 W	-	-	-
p-Si (p-type silicon)	280 W	-	-	-
Ti (titanium)	350 W	3 mTorr	350 W	2.0 Å s-1
TiO2 (titanium dioxide)	140 W	-	-	-
W (tungsten)	450 W	-	-	-
YSZ (yttria-stabilized zirconia)	140 W	-	-	-

Resources

SOPs & Troubleshooting

• SOP
• Target Request Form
• PVD-05 Target Lighting in Manual Mode

Master recipes

Coming soon

Step Number	T000	T001	T002	T003	T004	T005	T006
Step Time (sec)	-	-	-	-	-	-	-
Min Vacuum Setpoint (Torr)	-	-	-	-	-	-	-
Gas - (PID or Fixed)	-	-	-	-	-	-	-
Gas - PID Master Gas Select	-	-	-	-	-	-	-
Gas1 - Setpoint (sccm)	-	-	-	-	-	-	-
Gas2 - Setpoint (sccm)	-	-	-	-	-	-	-
Gas PID Pressure (mTorr)	-	-	-	-	-	-	-
RF Source - Sputter (Watts)	-	-	-	-	-	-	-
RF Source - Cathode Select	-	-	-	-	-	-	-
RF Source - Shutter	-	-	-	-	-	-	-
DC 1 Source - Sputter (Watts)	-	-	-	-	-	-	-
DC 1 Source - Cathode Select	-	-	-	-	-	-	-
DC 1 Source - Shutter	-	-	-	-	-	-	-
DC 2 Source - Sputter (Watts)	-	-	-	-	-	-	-
DC 2 Source - Shutter	-	-	-	-	-	-	-
Pressure Control (Throttle)	-	-	-	-	-	-	-
Ignition Pressure (mTorr)	-	-	-	-	-	-	-
Rotation Speed (0-100%)	-	-	-	-	-	-	-
End Process (Yes)	-	-	-	-	-	-	-