Difference between revisions of "Denton Explorer14 Magnetron Sputterer"

**Denton Explorer14 Magnetron Sputterer**
Tool Name	Denton Explorer14 Magnetron Sputterer
Instrument Type	Deposition
Staff Manager	Sam Azadi
Lab Location	Bay 2
Tool Manufacturer	Denton
Tool Model	Explorer14
NEMO Designation	{{{NEMO_Designation}}}
Lab Phone	XXXXX
SOP Link	SOP

Revision as of 16:19, 5 May 2022

Description

The Denton Explorer-14 is a magnetron sputter deposition tool for depositing metallic and dielectric films. Sputter deposition is achieved by bombarding a source material with energetic ions, typically Ar+. Atoms at the surface of the target are knocked loose, and transported to the surface of the substrate, where deposition occurs.

The tool is an open load system in sputter-down configuration with one dedicated DC gun and two guns that can use either a DC or RF power supply. Codeposition from two DC sources or one DC and one RF source is possible. The tool is equipped with a cryo-pump, with an automated interface, accepting substrate sizes from pieces through wafers with 150 mm diameters. The tool has platen rotation and cooling.

Maximum DC Power is 600 W.

Maximum RF Power is 200 W.

Deposition Sources

ITO
Cr
Ti
Ni
Cu
Al
SiO2
Ge
Pt
Au
Ag
Pd
Si
Al2O3
Mo
Various others - please contact staff

Maximum Allowed Deposition Power

Template:TargetTableItem

Material Name	Target	Maximum Allowed Power [W]

Resources

SOPs & Troubleshooting

@@ Line 47: / Line 47: @@
 ===== Maximum Allowed Deposition Power =====
-=====Material name	                Target	        Max allowed power [W]=====
+{| class="wikitable" style="width: 90%;"
-*Silver	                        *Ag	        *450
+|-
-*Aluminum	                Al	        450
+!scope="col" style="text-align:left; width: 15%"| Material Name
-*Gold	                        Au	        140
+!scope="col" style="text-align:left; width: 16%" | Target
-*Chromium	                Cr	        450
+!scope="col" style="text-align:left; width: 18%"| Maximum Allowed Power [W]
-*Copper	                        Cu	        450
+|-
-*Iron	                        Fe	        350
-*Germanium	                Ge	        140
+{{TargetTableItem|
-*Indium Tin Oxide	        ITO	        140
+|Material Name = Silver
-*Manganese	                Mn	        140
+|Target = Ag
-*Molybdenum	                Mo	        450
+|Maxium Allowed Power [W] = 450
-*Nickle	                        Ni              350
+}}
-*Palladium	                Pd	        140
-*Platinum	                Pt	        140
+|}
-*Silicon - doped	                Si (doped)	280
-*Silicon - undoped	        Si (undoped)	140
-*Titanium	                Ti	        350
-*Titanium oxide	                TiO2	        140
-*Tungsten	                W	        450
-*Yttria Stabilized Zirconia	YSZ	        140
 == Resources ==