Difference between revisions of "CEE 200X Spinner"

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[[Category:Soft Lithography]]
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{{EquipmentInfo
| name = Spinner - SU8/PDMS
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| name = CEE 200X Spinner
| Tool_Name = Spinner - SU8/PDMS
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| Tool_Name = CEE 200X Spinner
 
| image = [[Image:SPN-07.png |300px]]
 
| image = [[Image:SPN-07.png |300px]]
 
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Latest revision as of 16:13, 12 March 2024


CEE 200X Spinner
SPN-07.png
Tool Name CEE 200X Spinner
Instrument Type Back End
Staff Manager Ana Cohen
Lab Location Singh 124
Tool Manufacturer CEE
Tool Model 200X
NEMO Designation SPN-07
Lab Phone 3-9639
SOP Link SOP

Description

Spinner for coating substrates with resists and protective coverings for laser-cutting and dicing. Can also be used to apply PDMS. Control of ramp rate and speed. Includes wafer centering step.

Resources

SOPs & Troubleshooting
  • SOP: SOP
  • Video for basic tool use (6.47min):Video