Ancillary Process Chemicals at QNF

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The following are available within the QNF.

Name Manufacturer Chemical Composition Hazards Use Alternatives
HMDS (Vapor Prime) N/A HMDS Toxic, Irritant, Flammable Resist Adhesion Surpass 3000, Surpass 4000, KL Spin-on Primer 80/20
Surpass 3000 DisChem Proprietary, aqueous acidic Resist Adhesion Surpass 4000, HMDS Vapor Prime, KL Spin-on Primer 80/20
Surpass 4000 DisChem Proprietary, aqueous alkaline Resist Adhesion Surpass 3000, HMDS Vapor Prime, KL Spin-on Primer 80/20
KL Spin-on Primer 80/20 KemLab 20% HMDS, 80% Acetate Toxic, Irritant, Flammable Resist Adhesion HMDS Vapor Prime, Surpass 3000, Surpass 4000
Discharge H2O DisChem Proprietary Anti-charging for EBL Metal Deposition (Au)
Omnicoat MicroChem/Kayaku Proprietary SU8 Removal