ADT 7100 Dicing Saw

From Quattrone Nanofabrication Facility
Revision as of 11:27, 30 March 2022 by Trevinoj (talk | contribs) (Created page with "Category:Back End {{EquipmentInfo | name = ADT 7100 Dicing Saw | Tool_Name = ADT 7100 Dicing Saw | image = 300px | imagecaption = | Instrument_Type...")
(diff) ← Older revision | Latest revision (diff) | Newer revision → (diff)
Jump to navigation Jump to search


ADT 7100 Dicing Saw
BE-04.jpeg
Tool Name ADT 7100 Dicing Saw
Instrument Type Back End
Staff Manager Dave Jones
Lab Location Bay 2
Tool Manufacturer Advanced Dicing Technologies (ADT)
Tool Model 7100
NEMO Designation {{{NEMO_Designation}}}
Lab Phone XXXXX
SOP Link SOP

Description

Workhorse dicing saw with precision dicing and alignment system. This is an automated tool with a 2″, DC-brushless, 1.2 kW, Front-mounted, Air-bearing Spindle (60 krpm Max.), with closed-loop turntable, and is optimized for multi-angle dicing of thin, tight tolerance products up to 200 mm x 200 mm.

Applications
  • Dicing of Si wafers
  • Dicing of glass wafers
  • Dicing of sapphire wafers


Resources

SOPs & Troubleshooting