10.1116/6.0004361
Jump to navigation
Jump to search
Cryomicroscopy of low melting point metals [[1]]
Journal of Vacuum Science & Technology B 43, 04403
Authors
Michael Colletta (https://orcid.org/0000-0002-2571-8954)
Jamie Ford (https://orcid.org/0000-0002-7657-2465)
Joseph R. Michael (https://orcid.org/0000-0002-3405-2672)
David A. Mueller (https://orcid.org/0000-0003-4129-0473)
Lucille A. Giannuzzi (https://orcid.org/0000-0002-1353-3303)
Abstract
The effect of temperature on the sputter yield of indium was predicted based on both previously published and experimentally measured sputter yield data. The increase in the indium sputter yield with temperature can lead to damage when packaged as indium-bump semiconductor structures. Cryogenic (cryo) focused ion beam (FIB) milling, ex situ lift out micromanipulation, and cryogenic scanning transmission electron microscopy (STEM) were used to prepare indium specimens for high-resolution imaging. FIB milling at lower temperatures reduces the sputter yield of indium, preventing heating, damage, and possible void or bubble formation observed in bump structures. In addition, cryo-STEM imaging reduces contamination when imaging In at high resolution. These findings underscore the importance of specimen cooling and cryogenic characterization techniques in preventing thermal sputtering effects and contamination, particularly in low melting point materials, such as indium.
Raw Data
"indexed": {
"date-parts": [
[
2025,
6,
13
]
],
"date-time": "2025-06-13T04:06:11Z",
"timestamp": 1749787571642,
"version": "3.41.0"
},
"reference-count": 26,
"publisher": "American Vacuum Society",
"issue": "4",
"funder": [
{
"DOI": "10.13039/100006206",
"name": "Biological and Environmental Research",
"doi-asserted-by": "publisher",
"award": [
"DE-SC0020511"
],
"id": [
{
"id": "10.13039/100006206",
"id-type": "DOI",
"asserted-by": "publisher"
}
]
}
],
"content-domain": {
"domain": [
"pubs.aip.org"
],
"crossmark-restriction": true
},
"published-print": {
"date-parts": [
[
2025,
7,
1
]
]
},
"abstract": "<jats:p>The effect of temperature on the sputter yield of indium was predicted based on both previously published and experimentally measured sputter yield data. The increase in the indium sputter yield with temperature can lead to damage when packaged as indium-bump semiconductor structures. Cryogenic (cryo) focused ion beam (FIB) milling, ex situ lift out micromanipulation, and cryogenic scanning transmission electron microscopy (STEM) were used to prepare indium specimens for high-resolution imaging. FIB milling at lower temperatures reduces the sputter yield of indium, preventing heating, damage, and possible void or bubble formation observed in bump structures. In addition, cryo-STEM imaging reduces contamination when imaging In at high resolution. These findings underscore the importance of specimen cooling and cryogenic characterization techniques in preventing thermal sputtering effects and contamination, particularly in low melting point materials, such as indium.</jats:p>",
"DOI": "10.1116/6.0004361",
"type": "journal-article",
"created": {
"date-parts": [
[
2025,
6,
12
]
],
"date-time": "2025-06-12T12:10:58Z",
"timestamp": 1749730258000
},
"update-policy": "https://doi.org/10.1063/aip-crossmark-policy-page",
"source": "Crossref",
"is-referenced-by-count": 0,
"title": "Cryomicroscopy of low melting point metals",
"prefix": "10.1116",
"volume": "43",
"author": [
{
"ORCID": "https://orcid.org/0000-0002-2571-8954",
"authenticated-orcid": false,
"given": "Michael",
"family": "Colletta",
"sequence": "first",
"affiliation": [
{
"name": "Applied and Engineering Physics, Cornell University 1 , Ithaca, New York 14853"
}
]
},
{
"ORCID": "https://orcid.org/0000-0002-7657-2465",
"authenticated-orcid": false,
"given": "Jamie",
"family": "Ford",
"sequence": "additional",
"affiliation": [
{
"name": "Singh Center for Nanotechnology, University of Pennsylvania 2 , Philadelphia, Pennsylvania 19104"
}
]
},
{
"ORCID": "https://orcid.org/0000-0002-3405-2672",
"authenticated-orcid": false,
"given": "Joseph R.",
"family": "Michael",
"sequence": "additional",
"affiliation": [
{
"name": "Sandia National Lab 3 , Albuquerque, New Mexico 87123"
}
]
},
{
"ORCID": "https://orcid.org/0000-0003-4129-0473",
"authenticated-orcid": false,
"given": "David A.",
"family": "Muller",
"sequence": "additional",
"affiliation": [
{
"name": "Applied and Engineering Physics, Cornell University 1 , Ithaca, New York 14853"
},
{
"name": "Kavli Institute at Cornell for Nanoscale Science, Cornell University 4 , Ithaca, New York 14853"
}
]
},
{
"ORCID": "https://orcid.org/0000-0002-1353-3303",
"authenticated-orcid": false,
"given": "Lucille A.",
"family": "Giannuzzi",
"sequence": "additional",
"affiliation": [
{
"name": "EXpressLO LLC 5 , 5483 Lee St., Unit 12, Lehigh Acres, Florida 33971"
}
]
}
],
"member": "20",
"published-online": {
"date-parts": [
[
2025,
6,
12
]
]
},
"reference": [
{
"key": "2025061208105093800_c1",
"doi-asserted-by": "publisher",
"first-page": "345",
"DOI": "10.1038/s41586-018-0397-3",
"volume": "560",
"year": "2018",
"journal-title": "Nature"
},
{
"key": "2025061208105093800_c2",
"doi-asserted-by": "publisher",
"first-page": "3",
"DOI": "10.1111/j.1365-2818.1981.tb02483.x",
"volume": "124",
"year": "1981",
"journal-title": "J. Microsc."
},
{
"key": "2025061208105093800_c3",
"doi-asserted-by": "publisher",
"first-page": "27",
"DOI": "10.1016/S0091-679X(01)67003-1",
"volume": "67",
"year": "2001",
"journal-title": "Methods Cell Biol."
},
{
"key": "2025061208105093800_c4",
"doi-asserted-by": "publisher",
"first-page": "32",
"DOI": "10.1016/j.jsb.2013.10.019",
"volume": "185",
"year": "2014",
"journal-title": "J. Struct. Biol."
},
{
"key": "2025061208105093800_c5",
"doi-asserted-by": "publisher",
"first-page": "e70506",
"DOI": "10.7554/eLife.70506",
"volume": "10",
"year": "2021",
"journal-title": "eLife"
},
{
"key": "2025061208105093800_c6"
},
{
"key": "2025061208105093800_c7",
"doi-asserted-by": "publisher",
"first-page": "2250",
"DOI": "10.1016/j.chempr.2018.09.007",
"volume": "4",
"year": "2018",
"journal-title": "Chem"
},
{
"key": "2025061208105093800_c8",
"doi-asserted-by": "publisher",
"first-page": "42",
"DOI": "10.1111/j.1365-2818.2006.01567.x",
"volume": "222",
"year": "2006",
"journal-title": "J. Microsc."
},
{
"key": "2025061208105093800_c9",
"doi-asserted-by": "publisher",
"first-page": "298",
"DOI": "10.1002/jemt.22630",
"volume": "79",
"year": "2016",
"journal-title": "Microsc. Res. Tech."
},
{
"key": "2025061208105093800_c10",
"doi-asserted-by": "publisher",
"first-page": "4449",
"DOI": "10.1073/pnas.1201333109",
"volume": "109",
"year": "2012",
"journal-title": "Proc. Natl. Acad. Sci. U.S.A."
},
{
"key": "2025061208105093800_c11",
"doi-asserted-by": "publisher",
"first-page": "572",
"DOI": "10.1016/j.jsb.2012.08.012",
"volume": "180",
"year": "2012",
"journal-title": "J. Struct. Biol."
},
{
"key": "2025061208105093800_c12",
"doi-asserted-by": "publisher",
"first-page": "820",
"DOI": "10.1017/S1431927618004592",
"volume": "24",
"year": "2018",
"journal-title": "Microsc. Microanal."
},
{
"key": "2025061208105093800_c13",
"doi-asserted-by": "publisher",
"first-page": "757",
"DOI": "10.1038/s41592-019-0497-5",
"volume": "16",
"year": "2019",
"journal-title": "Nat. Methods"
},
{
"key": "2025061208105093800_c14",
"doi-asserted-by": "publisher",
"first-page": "145",
"DOI": "10.1093/micmic/ozac029",
"volume": "29",
"year": "2023",
"journal-title": "Microsc. Microanal."
},
{
"key": "2025061208105093800_c15",
"doi-asserted-by": "publisher",
"first-page": "66",
"DOI": "10.1093/micmic/ozad134",
"volume": "30",
"year": "2024",
"journal-title": "Microsc. Microanal."
},
{
"key": "2025061208105093800_c16",
"doi-asserted-by": "publisher",
"first-page": "603",
"DOI": "10.1017/S1431927622000496",
"volume": "28",
"year": "2022",
"journal-title": "Microsc. Microanal."
},
{
"key": "2025061208105093800_c17",
"doi-asserted-by": "publisher",
"first-page": "1802",
"DOI": "10.1016/j.microrel.2014.08.004",
"volume": "54",
"year": "2014",
"journal-title": "Microelectron. Reliab."
},
{
"key": "2025061208105093800_c18",
"first-page": "9",
"year": "1981"
},
{
"key": "2025061208105093800_c19",
"volume-title": "Ion-Solid Interactions: Fundamentals and Applications",
"year": "1996"
},
{
"key": "2025061208105093800_c20",
"doi-asserted-by": "publisher",
"first-page": "216",
"DOI": "10.1017/S1431927603030034",
"volume": "9",
"year": "2003",
"journal-title": "Microsc. Microanal."
},
{
"key": "2025061208105093800_c21",
"doi-asserted-by": "publisher",
"first-page": "291",
"DOI": "10.1080/14786436508221857",
"volume": "11",
"year": "1965",
"journal-title": "Philos. Mag."
},
{
"key": "2025061208105093800_c22",
"doi-asserted-by": "publisher",
"first-page": "255",
"DOI": "10.1016/0168-583X(93)96027-A",
"volume": "82",
"year": "1993",
"journal-title": "Nucl. Instrum. Methods Phys. Res. B"
},
{
"key": "2025061208105093800_c23",
"doi-asserted-by": "publisher",
"first-page": "263",
"DOI": "10.1111/j.1365-2818.2007.01775.x",
"volume": "226",
"year": "2007",
"journal-title": "J. Microsc."
},
{
"key": "2025061208105093800_c24",
"doi-asserted-by": "publisher",
"first-page": "1034",
"DOI": "10.1017/S1431927615013720",
"volume": "21",
"year": "2015",
"journal-title": "Microsc. Microanal."
},
{
"key": "2025061208105093800_c25",
"doi-asserted-by": "publisher",
"first-page": "1818",
"DOI": "10.1016/j.nimb.2010.02.091",
"volume": "268",
"year": "2010",
"journal-title": "Nucl. Instrum. Methods Phys. Res. B"
},
{
"key": "2025061208105093800_c26",
"doi-asserted-by": "publisher",
"first-page": "659",
"DOI": "10.1088/0022-3727/9/4/016",
"volume": "9",
"year": "1976",
"journal-title": "J. Phys. D: Appl. Phys."
}
],
"container-title": "Journal of Vacuum Science & Technology B",
"original-title": [],
"language": "en",
"link": [
{
"URL": "https://pubs.aip.org/avs/jvb/article-pdf/doi/10.1116/6.0004361/20556529/044003_1_6.0004361.pdf",
"content-type": "application/pdf",
"content-version": "vor",
"intended-application": "syndication"
},
{
"URL": "https://pubs.aip.org/avs/jvb/article-pdf/doi/10.1116/6.0004361/20556529/044003_1_6.0004361.pdf",
"content-type": "unspecified",
"content-version": "vor",
"intended-application": "similarity-checking"
}
],
"deposited": {
"date-parts": [
[
2025,
6,
12
]
],
"date-time": "2025-06-12T12:10:59Z",
"timestamp": 1749730259000
},
"score": 1,
"resource": {
"primary": {
"URL": "https://pubs.aip.org/jvb/article/43/4/044003/3349801/Cryomicroscopy-of-low-melting-point-metals"
}
},
"subtitle": [],
"short-title": [],
"issued": {
"date-parts": [
[
2025,
6,
12
]
]
},
"references-count": 26,
"journal-issue": {
"issue": "4",
"published-print": {
"date-parts": [
[
2025,
7,
1
]
]
}
},
"URL": "http://dx.doi.org/10.1116/6.0004361",
"relation": {},
"ISSN": [
"2166-2746",
"2166-2754"
],
"subject": [],
"published-other": {
"date-parts": [
[
2025,
7
]
]
},
"published": {
"date-parts": [
[
2025,
6,
12
]
]
}